Xue, H.; Li, X.; Lu, Y.; Xie, B.; Chen, D.; Wang, J.; Chen, J.
A Method for Fabricating Cavity-SOI and Its Verification Using Resonant Pressure Sensors. Micromachines 2025, 16, 297.
https://doi.org/10.3390/mi16030297
AMA Style
Xue H, Li X, Lu Y, Xie B, Chen D, Wang J, Chen J.
A Method for Fabricating Cavity-SOI and Its Verification Using Resonant Pressure Sensors. Micromachines. 2025; 16(3):297.
https://doi.org/10.3390/mi16030297
Chicago/Turabian Style
Xue, Han, Xingyu Li, Yulan Lu, Bo Xie, Deyong Chen, Junbo Wang, and Jian Chen.
2025. "A Method for Fabricating Cavity-SOI and Its Verification Using Resonant Pressure Sensors" Micromachines 16, no. 3: 297.
https://doi.org/10.3390/mi16030297
APA Style
Xue, H., Li, X., Lu, Y., Xie, B., Chen, D., Wang, J., & Chen, J.
(2025). A Method for Fabricating Cavity-SOI and Its Verification Using Resonant Pressure Sensors. Micromachines, 16(3), 297.
https://doi.org/10.3390/mi16030297