Wu, Q.; Chen, Y.; Cao, Q.; Zhao, J.; Wang, S.; Wang, J.; Li, M.
The Design and Fabrication of a MEMS Electronic Calibration Chip. Micromachines 2022, 13, 2139.
https://doi.org/10.3390/mi13122139
AMA Style
Wu Q, Chen Y, Cao Q, Zhao J, Wang S, Wang J, Li M.
The Design and Fabrication of a MEMS Electronic Calibration Chip. Micromachines. 2022; 13(12):2139.
https://doi.org/10.3390/mi13122139
Chicago/Turabian Style
Wu, Qiannan, Yu Chen, Qianlong Cao, Jingchao Zhao, Shanshan Wang, Junqiang Wang, and Mengwei Li.
2022. "The Design and Fabrication of a MEMS Electronic Calibration Chip" Micromachines 13, no. 12: 2139.
https://doi.org/10.3390/mi13122139
APA Style
Wu, Q., Chen, Y., Cao, Q., Zhao, J., Wang, S., Wang, J., & Li, M.
(2022). The Design and Fabrication of a MEMS Electronic Calibration Chip. Micromachines, 13(12), 2139.
https://doi.org/10.3390/mi13122139