Kluba, M.M.; Li, J.; Parkkinen, K.; Louwerse, M.; Snijder, J.; Dekker, R.
Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication. Micromachines 2021, 12, 414.
https://doi.org/10.3390/mi12040414
AMA Style
Kluba MM, Li J, Parkkinen K, Louwerse M, Snijder J, Dekker R.
Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication. Micromachines. 2021; 12(4):414.
https://doi.org/10.3390/mi12040414
Chicago/Turabian Style
Kluba, Marta Maria, Jian Li, Katja Parkkinen, Marcus Louwerse, Jaap Snijder, and Ronald Dekker.
2021. "Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication" Micromachines 12, no. 4: 414.
https://doi.org/10.3390/mi12040414
APA Style
Kluba, M. M., Li, J., Parkkinen, K., Louwerse, M., Snijder, J., & Dekker, R.
(2021). Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication. Micromachines, 12(4), 414.
https://doi.org/10.3390/mi12040414