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Journal: MaterialsVolume: 18Number: 1781
Article: Surface Modification and Crystal Quality Improvement of 4H-SiC Film via Laser Treatment: Comparison of Continuous Wave and Femtosecond Pulse Laser
- Authors:
- Xu Han 1,†,
- Jiantao Zhou 1,2,† and
- Sheng Liu 1,4,5,*
- et al.
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