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Journal: Materials, 2023
Volume: 16
Number: 1959
Article:
Effect of a ZrO2 Seed Layer on an Hf0.5Zr0.5O2 Ferroelectric Device Fabricated via Plasma Enhanced Atomic Layer Deposition
Authors:
by
Ji-Na Song, Min-Jung Oh and Chang-Bun Yoon
Link:
https://www.mdpi.com/1996-1944/16/5/1959
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