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Journal: Materials, 2022
Volume: 15
Number: 2260

Article: The Optical and Thermo-Optical Properties of Non-Stoichiometric Silicon Nitride Layers Obtained by the PECVD Method with Varying Levels of Nitrogen Content
Authors: by Stanisława Kluska, Maria Jurzecka-Szymacha, Natalia Nosidlak, Piotr Dulian and Janusz Jaglarz
Link: https://www.mdpi.com/1996-1944/15/6/2260

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