High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure

Liu, Yulong; Wang, Hongliang; Zhang, Feng; Gou, Luhao; Zhang, Shengkuo; Cao, Gang; Zhang, Pengcheng

doi:10.3390/s23249895

Open AccessArticle

High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure

by

Yulong Liu

,

Hongliang Wang

^*,

Feng Zhang

,

Luhao Gou

,

Shengkuo Zhang

,

Gang Cao

and

Pengcheng Zhang

National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China

^*

Author to whom correspondence should be addressed.

Sensors 2023, 23(24), 9895; https://doi.org/10.3390/s23249895

Submission received: 15 November 2023 / Revised: 1 December 2023 / Accepted: 12 December 2023 / Published: 18 December 2023

(This article belongs to the Section Sensor Materials)

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Abstract

Surface acoustic wave resonators are widely applied in electronics, communication, and other engineering fields. However, the spurious modes generally present in resonators can cause deterioration in device performance. Therefore, this paper proposes a hexagonal weighted structure to suppress them. With the construction of a finite element resonator model, the parameters of the interdigital transducer (IDT) and the area of the dummy finger weighting are determined. The spurious waves are confined within the dummy finger area, whereas the main mode is less affected by this structure. To verify the suppression effect of the simulation, resonators with conventional and hexagonal weighted structures are fabricated using the micro-electromechanical systems (MEMS) process. After the S-parameter test of the prepared resonators, the hexagonal weighted resonators achieve a high level of spurious mode suppression. Their properties are superior to those of the conventional structure, with a higher Q value (10,406), a higher minimum return loss (25.7 dB), and a lower ratio of peak sidelobe (19%). This work provides a feasible solution for the design of SAW resonators to suppress spurious modes.

Keywords: surface acoustic wave (SAW); hexagonal weighted resonator; high Q value; suppress spurious modes; MEMS process

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MDPI and ACS Style

Liu, Y.; Wang, H.; Zhang, F.; Gou, L.; Zhang, S.; Cao, G.; Zhang, P. High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure. Sensors 2023, 23, 9895. https://doi.org/10.3390/s23249895

AMA Style

Liu Y, Wang H, Zhang F, Gou L, Zhang S, Cao G, Zhang P. High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure. Sensors. 2023; 23(24):9895. https://doi.org/10.3390/s23249895

Chicago/Turabian Style

Liu, Yulong, Hongliang Wang, Feng Zhang, Luhao Gou, Shengkuo Zhang, Gang Cao, and Pengcheng Zhang. 2023. "High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure" Sensors 23, no. 24: 9895. https://doi.org/10.3390/s23249895

APA Style

Liu, Y., Wang, H., Zhang, F., Gou, L., Zhang, S., Cao, G., & Zhang, P. (2023). High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure. Sensors, 23(24), 9895. https://doi.org/10.3390/s23249895

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High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure

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