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Journal: Sensors, 2018
Volume: 18
Number: 2036
Article:
Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs
Authors:
by
Qianbo Lu, Jian Bai, Kaiwei Wang, Peiwen Chen, Weidong Fang and Chen Wang
Link:
https://www.mdpi.com/1424-8220/18/7/2036
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