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Journal: Sensors, 2012
Volume: 12
Number: 8770

Article: Comparisons between Membrane, Bridge and Cantilever Miniaturized Resistive Vacuum Gauges
Authors: by Kasun Gardiye Punchihewa, Evan Zaker, Rade Kuljic, Koushik Banerjee, Tatjana Dankovic, Alan Feinerman and Heinz Busta
Link: https://www.mdpi.com/1424-8220/12/7/8770

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