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Journal: Sensors, 2012
Volume: 12
Number: 15873
15873-15887
Article: Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity
Authors: by Genki Yoshikawa, Terunobu Akiyama, Frederic Loizeau, Kota Shiba, Sebastian Gautsch, Tomonobu Nakayama, Peter Vettiger, Nico F. de Rooij and Masakazu Aono
Link: https://www.mdpi.com/1424-8220/12/11/15873

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