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Journal: SensorsVolume: 12Number: 15873
Article: Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity
  • Authors:
  • Genki Yoshikawa 1,*,
  • Terunobu Akiyama 2 and
  • Masakazu Aono 1
  • et al.
Link: https://www.mdpi.com/1424-8220/12/11/15873

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