- Article
A Temperature-Compensated Single-Crystal Silicon-on-Insulator (SOI) MEMS Oscillator with a CMOS Amplifier Chip
- Mohammad S. Islam,
- Ran Wei,
- Jaesung Lee,
- Yong Xie,
- Soumyajit Mandal and
- Philip X.-L. Feng
Self-sustained feedback oscillators referenced to MEMS/NEMS resonators have the potential for a wide range of applications in timing and sensing systems. In this paper, we describe a real-time temperature compensation approach to improving the long-t...