- Article
Homogeneity of Electro-Mechanical and Optical Characteristics in Ring-Shaped MEMS Shutter Arrays with Subfield Addressing for Interference Microscopy
- Philipp Kästner,
- Basma Elsaka,
- Mustaqim Siddi Que Iskhandar,
- Steffen Liebermann,
- Roland Donatiello,
- Shujie Liu and
- Hartmut Hillmer
We present a MEMS array-based approach for micro-irises called “ring shutter”, utilizing subfield addressing for applications in advanced micro-optics, such as interference microscopy. This experimental study is focused on investigating t...