The paper presents a technique to obtain an electrically-tunable matching between the series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to increase the effectiveness of acoustic emission/detection in voltage-mode dr...
Electrothermal actuators are highly advantageous for microelectromechanical systems (MEMS) due to their capability to generate significant force and large displacements. Despite these benefits, their application in reconfigurable conduction line swit...
A piezoelectric MEMS pressure sensor that exploits the first antisymmetric vibration mode (A0) of Lamb waves is presented. The 6 mm × 6 mm diaphragm used to sense the applied pressure is composed of a stack of doped silicon (Si) and aluminum ni...
This paper proposes a system in package (SiP) for ultrasonic ranging composed of a 4 × 8 matrix of piezoelectric micromachined ultrasonic transducers (PMUT) and an interface integrated circuit (IC). The PMUT matrix is fabricated using the PiezoMUMPS...
In various applications, damping from the surrounding fluid severely degrades the performance of micro-electro-mechanical systems (MEMS). In this paper, mechanical amplification through parametric resonance was investigated in a piezoelectrically act...
This work presents the design, fabrication, and experimental characterization of microelectromechanical system (MEMS) ultrasonic transducers engineered for multi-frequency operation in photoacoustic imaging (PAI). The proposed devices integrate multi...
While 3-D microelectromechanical systems (MEMS) allow switching between a large number of ports in optical telecommunication networks, the development of such systems often suffers from design, fabrication and packaging constraints due to the complex...
MEMS switches offer great advantages over solid-state and conventional electromechanical switches, including a compact size and high isolation. This paper presents a novel silicon-to-silicon (Si-to-Si) MEMS switch featuring two suspended actuated pla...