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Open AccessCommunication

A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications

1
Department of Applied Sciences, Université du Québec à Chicoutimi (UQAC), Chicoutimi, QC G7H 2B1, Canada
2
Department of Electrical Engineering, École de Technologie Supérieure (ETS), Montreal, QC H3C 1K3, Canada
3
Department of Computer Sciences, Université du Québec à Montréal (UQAM), Montreal, QC H2X 3Y7, Canada
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio Ferrari
Sensors 2021, 21(8), 2590; https://doi.org/10.3390/s21082590
Received: 25 February 2021 / Revised: 2 April 2021 / Accepted: 3 April 2021 / Published: 7 April 2021
(This article belongs to the Section Physical Sensors)
This paper proposes a system in package (SiP) for ultrasonic ranging composed of a 4 × 8 matrix of piezoelectric micromachined ultrasonic transducers (PMUT) and an interface integrated circuit (IC). The PMUT matrix is fabricated using the PiezoMUMPS process and the IC is implemented in the AMS 0.35 µm technology. Simulation results for the PMUT are compared to the measurement results, and an equivalent circuit has been derived to allow a better approximation of the load of the PMUT on the IC. The control circuit is composed of a high-voltage pulser to drive the PMUT for transmission and of a transimpedance amplifier to amplify the received echo. The working frequency of the system is 1.5 MHz. View Full-Text
Keywords: piezoelectric micromachined ultrasonic transducers (PMUT); high voltage pulser; transimpedance amplifier (TIA); regulated cascode (RGC) piezoelectric micromachined ultrasonic transducers (PMUT); high voltage pulser; transimpedance amplifier (TIA); regulated cascode (RGC)
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MDPI and ACS Style

Robichaud, A.; Deslandes, D.; Cicek, P.-V.; Nabki, F. A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications. Sensors 2021, 21, 2590. https://doi.org/10.3390/s21082590

AMA Style

Robichaud A, Deslandes D, Cicek P-V, Nabki F. A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications. Sensors. 2021; 21(8):2590. https://doi.org/10.3390/s21082590

Chicago/Turabian Style

Robichaud, Alexandre; Deslandes, Dominic; Cicek, Paul-Vahé; Nabki, Frederic. 2021. "A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications" Sensors 21, no. 8: 2590. https://doi.org/10.3390/s21082590

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