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RF-Characterization of HZO Thin Film Varactors

Sukhrob Abdulazhanov,
Quang Huy Le,
Dang Khoa Huynh,
Defu Wang and ,
Maximilian Lederer,
Ricardo Olivo,
Konstantin Mertens,
Jennifer Emara,
Thomas Kämpfe and
Gerald Gerlach
+ 5 authors+ 0 author

Crystals2021, 11(8), 980;https://doi.org/10.3390/cryst11080980

18 August 2021

A microwave characterization at UHF band of a ferroelectric hafnium zirconium oxide metal-ferroelectric-metal (MFM) capacitors for varactor applications has been performed. By using an impedance reflectivity method, a complex dielectric permittivity...

(This article belongs to the Special Issue Ferroelectrics Materials for Microwave Devices)

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RF-Characterization of HZO Thin Film Varactors