Next Generation MEMS: Design, Development, and Application

Dear Colleagues,

Micro/nanoelectromechanical systems (MEMS/NEMS) are the micro/nanoscale integration of sensors, actuators,  electronics, and other devices. The MEMS area has become very broad and includes mechanical, optical, thermal, magnetic, chemical, or biological systems, with applications such as inertial MEMS, medical and BioMEMS, RF MEMS, power MEMS, etc. The electronics help to provide control, detection, signal processing, and transmission. Over the past several decades, MEMS has steadily replaced bulky sensors in various areas, including consumer electronics, automotive, and telecommunications due to their low cost, small footprint, good performance, and low power, so well suitable for smart systems integration. The future MEMS are expected to be extremely precise, highly reliable, and self-repairable to penetrate emerging markets such as space exploration, medical devices, quantum computing, autonomous vehicles, energy, and hypersonics. 

This topical collection solicits review and original articles that report on the development of next-generation MEMS/NEMS at different levels of abstractions. At the physical level, mechanically superior materials and transduction mechanisms are being actively researched, while at the device level, sensitive and reliable multifunctional MEMS sensors and actuators are constantly being devised. In addition, energy-efficient and low-noise microchips are crucial to produce high-performance MEMS at the circuit level. Finally, we also welcome articles that address practical issues such as packaging of MEMS for niche environments such as human body implants, wearable devices, personalized and precision medicine, extreme operational environment, hypersonics, etc. 

Dr. Faisal Mohd-Yasin
Prof. Dr. Pietro Siciliano
Prof. Dr. Vamsy Chodavarapu
Collection Editors

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