Advances and Applications of Micro/Nano-Electronic Sensors

Dear Colleagues,

Wearable electronics have started to gain momentum because of their essential role in improving the quality of life for various patients and healthy individuals. The function and performance of integrated NEMS/MEMS systems depend on the design of nano-/microsystems, choice of materials, manufacturing approaches, packaging, and device integration methods. It is also of high interest to investigate the interrelationships between material properties and processing, device/system structure, and the mechanical, electrical, optical, or (bio)chemical behavior of devices/systems. Resonant sensors are a type of sensor that relies on the measurement of resonant frequency to detect a variety of physical parameters such as pressure, temperatures, viscosity, gas concentrations, accelerations, etc. This type of sensor has drawn a significant amount of attention due to its excellent stability, resolution, and accuracy. In addition, this type of sensor allows devices to be easily connected to digital systems, which is required for its effective employment as a measurement device.

Prof. Dr. Huanyu Cheng
Prof. Dr. Haifeng Zhang
Dr. Zhiqun (Daniel) Deng
Guest Editors

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