Optical Fabrication and Optical Detection for Microelectronics
A special issue of Photonics (ISSN 2304-6732). This special issue belongs to the section "Optical Interaction Science".
Deadline for manuscript submissions: 31 December 2025 | Viewed by 61
Special Issue Editors
Interests: photonics
Interests: optical design; non-imaging optics; diffraction imaging; micro-nano fabrication; optical measurement
Interests: laser; laser processing; light-mater interaction; attosecond pulses; optical detection
Interests: optical detection; lithographic alignment; optical imaging; laser processing; fringe analysis; intelligent sensing; microelectronics manufacturing; structured light; interference imaging; AI in optics
Special Issue Information
Dear Colleagues,
We are pleased to invite you to contribute to this Special Issue on “Optical Fabrication and Optical Detection for Microelectronics”. With the continuous scaling of semiconductor devices and the growing demand for high-precision microfabrication, optical technologies are playing an increasingly critical role in both micro/nano-structure fabrication and precision detection. Techniques such as laser-assisted lithography, photonic nanofabrication, and ultrafast laser machining offer high-throughput, non-contact, and accurate solutions for advanced microelectronics manufacturing. Simultaneously, optical detection methods—ranging from interferometry and scatterometry to polarization-based sensing and microscopic imaging—provide essential capabilities for in-line monitoring and process control.)
This Special Issue aims to present the latest advances in optical fabrication and detection technologies that support the development of next-generation microelectronics. The topics of interest align with the scope of Photonics and include novel optical techniques, AI-integrated detection systems, and smart inspection strategies. We seek to foster interdisciplinary collaboration among researchers in photonics, optical engineering, microfabrication, and integrated circuit processing. The goal is to collect at least 10 high-quality contributions, which may also be compiled into a printed book format upon meeting the publication threshold.
In this Special Issue, we welcome both original research articles and comprehensive reviews. Topics of interest include, but are not limited to:
- Optical lithography and nanofabrication;
- Laser-based micro/nano-processing;
- Interference and holographic lithography;
- Optical alignment and overlay detection;
- Scatterometry and imaging-based inspection;
- Polarization-resolved and hyperspectral optical sensing;
- Microscopic imaging technologies;
- AI-assisted optical signal analysis and defect detection;
- Optical inspection systems in advanced packaging;
- In situ and real-time optical monitoring technologies.
We look forward to receiving your contributions.
Dr. Nan Wang
Dr. Yu He
Dr. Yang Wang
Dr. Wei Jiang
Guest Editors
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Photonics is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
Keywords
- optical detection
- micro/nano fabrication
- lithography alignment
- laser processing
- fringe analysis
- interference imaging
- optical inspection
- scatterometry
- machine vision
- photonic sensing
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