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Micromachines 2014, 5(4), 1106-1134;

Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications

State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China
Author to whom correspondence should be addressed.
Received: 9 October 2014 / Revised: 22 October 2014 / Accepted: 22 October 2014 / Published: 17 November 2014
(This article belongs to the Special Issue Laser Micro- and Nano- Processing)
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The creation of complex three-dimensional (3D) fluidic systems composed of hollow micro- and nanostructures embedded in transparent substrates has attracted significant attention from both scientific and applied research communities. However, it is by now still a formidable challenge to build 3D micro- and nanofluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. As a direct and maskless fabrication technique, femtosecond laser micromachining provides a straightforward approach for high-precision, spatially-selective, modification inside transparent materials through nonlinear optical absorption. In this paper, we demonstrate rapid fabrication of high-aspect-ratio micro- and/or nanofluidic structures with various 3D configurations by femtosecond laser direct writing in porous glass substrates. Based on this approach, we demonstrate several functional micro- and nanofluidic devices including a 3D passive microfluidic mixer, a capillary electrophoresis (CE) analysis chip, and an integrated micro-nanofluidic system for single DNA analysis. The possible mechanisms behind the formation of high-aspect-ratio micro- and nanochannels are also discussed. This technology offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications. View Full-Text
Keywords: femtosecond laser; 3D fabrication; microfluidics; nanofluidics; porous glass femtosecond laser; 3D fabrication; microfluidics; nanofluidics; porous glass

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Liao, Y.; Cheng, Y. Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications. Micromachines 2014, 5, 1106-1134.

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