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Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser

Institute of Information and Communication Technologies, Electronics and Applied Mathematics (ICTEAM), Université Catholique de Louvain, B-1348 Louvain-la-Neuve, Belgium
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Academic Editor: Maria Farsari
Micromachines 2015, 6(1), 19-31; https://doi.org/10.3390/mi6010019
Received: 18 July 2014 / Accepted: 8 December 2014 / Published: 23 December 2014
(This article belongs to the Special Issue Laser Micro- and Nano- Processing)
Ten picoseconds (200 kHz) ultrafast laser micro-structuring of piezoelectric substrates including AT-cut quartz, Lithium Niobate and Lithium Tantalate have been studied for the purpose of piezoelectric devices application ranging from surface acoustic wave devices, e.g., bandpass filters, to photonic devices such as optical waveguides and holograms. The study examines the impact of changing several laser parameters on the resulting microstructural shapes and morphology. The micromachining rate has been observed to be strongly dependent on the operating parameters, such as the pulse fluence, the scan speed and the scan number. The results specifically indicate that ablation at low fluence and low speed scan tends to form a U-shaped cross-section, while a V-shaped profile can be obtained by using a high fluence and a high scan speed. The evolution of surface morphology revealed that laser pulses overlap in a range around 93% for both Lithium Niobate (LiNbO3) and Lithium Tantalate (LiTaO3) and 98% for AT-cut quartz can help to achieve optimal residual surface roughness. View Full-Text
Keywords: picosecond; piezoelectric substrates; AT-cut quartz; Lithium Niobate; Lithium Tantalate; fluence; scan speed; scan number; laser ablation picosecond; piezoelectric substrates; AT-cut quartz; Lithium Niobate; Lithium Tantalate; fluence; scan speed; scan number; laser ablation
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EL Fissi, L.; Xhurdebise, V.; Francis, L.A. Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser. Micromachines 2015, 6, 19-31.

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