MEMS/NEMS Sensors and Energy Harvesters

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: closed (31 August 2022) | Viewed by 2630

Special Issue Editor


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Guest Editor
Department of Electrical and Computer Engineering, Clemson University, Clemson, SC 29634, USA
Interests: III-Nitride MEMS; chemical sensors; biosensors; 2D materials; nanoelectronics
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Special Issue Information

Dear Colleagues,

Energy harvesters based on Micro-electromechanical systems (MEMS) are well known nowadays due to their small features, ability for monolithic integration with the integrated circuit in a single platform, robust, and easily fabricated in bulk. The piezoelectric (PZT), based on variety of micro and nanoscale materials, as well and the electromagnetic (EM) generators in various forms and functionalities, constitute examples of such energy harvesters. To further increase their effectiveness in harvesting ambient energy, researchers started to venture into hybrid or multimodal energy harvesters that can not only power sensors but also microcontrollers and data transmission.

Recently, different energy harvesting technologies have undergone significant innovation, providing key functionalities in diversified systems such as energy harvesters and self-powered sensors. Accordingly, this Special Issue seeks to showcase research papers and review articles that are focused on advanced developments for the design, fabrication, integration, and application of energy harvesting technologies and MEMS/NEMS sensors, with particular interests in the integration of energy harvesters and nanogenerators with MEMS/NEMS Sensors and systems. 

Prof. Dr. Goutam Koley
Guest Editor

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Keywords

  • energy harvesters
  • nanogenerators
  • self-powered sensors
  • smart electronics
  • MEMS/NEMS sensors

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Published Papers (1 paper)

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Research

11 pages, 24159 KiB  
Article
Research on Wave Energy Harvesting Technology of Annular Triboelectric Nanogenerator Based on Multi-Electrode Structure
by Chun Jie Wang, Fan Meng, Qiang Fu, Chen Hui Fan and Lin Cui
Micromachines 2022, 13(10), 1619; https://doi.org/10.3390/mi13101619 - 27 Sep 2022
Cited by 7 | Viewed by 2172
Abstract
Triboelectric nanogenerators can convert wave energy into the electrical energy required by ocean sensors, but the problem of the low electrical output performance of triboelectric nanogenerators has always been a concern. In this paper, an annular triboelectric nanogenerator (A-TENG) composed of an annular [...] Read more.
Triboelectric nanogenerators can convert wave energy into the electrical energy required by ocean sensors, but the problem of the low electrical output performance of triboelectric nanogenerators has always been a concern. In this paper, an annular triboelectric nanogenerator (A-TENG) composed of an annular outer shell and an inner ball is proposed to improve the electrical output performance of the triboelectric nanogenerator by optimizing the structural parameters and wave parameters. Using the control variables, the effects of structural parameters (structure size, number of electrodes, electrode spacing, inner ball diameter, and number of inner balls) and wave parameters (wave frequency and wave amplitude) on the electrical output performance of the A-TENG were studied by combining COMSOL simulation and experimental research. The experimental results show that increasing the diameter and number of inner spheres can improve the open-circuit voltage between electrodes; the multi-electrode structure can improve the electron transfer rate and efficiently collect wave energy in all directions; and within the range of fixed sea conditions, there is an optimal annular size, which has the advantages of good electrical output performance and small size. The electrical output performance of the A-TENG can be greatly improved by optimizing the structural parameters. There are optimal wave parameters, such that the A-TENG can maximize the ocean wave energy conversion. This low-cost, long-life, efficient, and reliable energy harvesting system is ideal for powering ocean sensors. Full article
(This article belongs to the Special Issue MEMS/NEMS Sensors and Energy Harvesters)
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