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Micromachines
Special Issues
MEMS/NEMS Sensors: Fabrication and Application, Volume III
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MEMS/NEMS Sensors: Fabrication and Application, Volume III

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: closed (30 November 2021) | Viewed by 9062

Special Issue Editor

Prof. Dr. Goutam Koley

E-Mail Website
Guest Editor
Department of Electrical and Computer Engineering, Clemson University, Clemson, SC 29634, USA
Interests: III-Nitride MEMS; chemical sensors; biosensors; 2D materials; nanoelectronics
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

As a result of the ever-expanding applications of micro- and nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass, or stress, caused by alterations in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.

Despite a long history of development, the fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry. Many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors and two-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions.

For this Special Issue, you are invited to submit contributions describing developments in the broad area of MEMS/NEMS-based sensors ranging from nanoscale to macroscale in dimensions and operating over a large range of frequencies, from GHz to a few Hz. The scope of this Special Issue covers different types of individual MEMS/NEMS sensors—made with traditional and emerging materials by employing various transduction schemes, sensor networks, and multimodal data fusion—theory and applications, physical models, and fabrication techniques.

Prof. Dr. Goutam Koley
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS/NEMS Sensors
  • Sensor fabrication
  • Physical sensors
  • Chemical sensors
  • Biological sensors
  • Radiation sensors

Published Papers (4 papers)

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Research

9 pages, 2075 KiB  
Article
A Miniature Four-Channel Ion Trap Array Based on Non-silicon MEMS Technology
by Qi Zhang, Xichi Lu, Ting Chen, Yu Xiao, Rujiao Yao and Jinyuan Yao
Micromachines 2021, 12(7), 831; https://doi.org/10.3390/mi12070831 - 16 Jul 2021
Cited by 3 | Viewed by 2099
Abstract
With the increasing application field, a higher requirement is put forward for the mass spectrometer. The reduction in size will inevitably cause a loss of precision; therefore, it is necessary to develop a high-performance miniature mass spectrometer. Based on the researches of rectangular [...] Read more.
With the increasing application field, a higher requirement is put forward for the mass spectrometer. The reduction in size will inevitably cause a loss of precision; therefore, it is necessary to develop a high-performance miniature mass spectrometer. Based on the researches of rectangular ion trap, the relationship between mass resolution and structural parameters of the ion trap array was analyzed by further simulation. The results indicate that, considering the balance of mass resolution and extraction efficiency, the preferable values for the field radius of exit direction y0 and ion exit slot width s0 are 1.61 mm and 200 μm, respectively. Afterwards, a miniature four-channel ion trap array (MFITA) was fabricated, by using MEMS and laser etching technology, and mass spectrometry experiments were carried out to demonstrate its performance. The mass resolution of butyl diacetate with m/z = 230 can reach 324. In addition, the consistency of four channels is verified within the error tolerance, by analyzing air samples. Our work can prove the correctness of the structural design and the feasibility of MEMS preparation for MFITA, which will bring meaningful guidance for its future development and optimization. Full article
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application, Volume III)
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14 pages, 5631 KiB  
Article
Temperature Compensation of the MEMS-Based Electrochemical Seismic Sensors
by Chao Xu, Junbo Wang, Deyong Chen, Jian Chen, Wenjie Qi, Bowen Liu, Tian Liang and Xu She
Micromachines 2021, 12(4), 387; https://doi.org/10.3390/mi12040387 - 02 Apr 2021
Cited by 4 | Viewed by 2074
Abstract
Electrochemical seismic sensors that employ liquid as their inertial masses have the advantages of high performances in the low-frequency domain and a large working inclination. However, the surrounding temperature changes have serious impacts on the sensitivities of the sensors, which makes them unable [...] Read more.
Electrochemical seismic sensors that employ liquid as their inertial masses have the advantages of high performances in the low-frequency domain and a large working inclination. However, the surrounding temperature changes have serious impacts on the sensitivities of the sensors, which makes them unable to work as expected. This paper studied the temperature characteristics of electrochemical seismic sensors based on MEMS (micro–electro–mechanical systems), and analyzed the influences of the temperature effects on the open-loop and closed-loop amplitude-frequency curves. Most importantly, the temperature compensation circuits based on thermistors were developed, which effectively adjusted pole frequencies and sensitivity coefficients, and finally realized the real-time temperature compensation for both open-loop and closed-loop measurements for the first time. The results showed that in the temperature range of −10 °C ~ +40 °C, and with the 3 dB bandwidth range of 0.01 Hz ~ 40 Hz, the change of the maximum sensitivity was reduced from about 25 dB before temperature compensation to less than 2 dB after temperature compensation. Full article
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application, Volume III)
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12 pages, 16580 KiB  
Article
A Novel Impedance Micro-Sensor for Metal Debris Monitoring of Hydraulic Oil
by Hongpeng Zhang, Haotian Shi, Wei Li, Laihao Ma, Xupeng Zhao, Zhiwei Xu, Chenyong Wang, Yucai Xie and Yuwei Zhang
Micromachines 2021, 12(2), 150; https://doi.org/10.3390/mi12020150 - 03 Feb 2021
Cited by 7 | Viewed by 2059
Abstract
Hydraulic oil is the key medium for the normal operation of hydraulic machinery, which carries various wear debris. The information reflected by the wear debris can be used to predict the early failure of equipment and achieve predictive maintenance. In order to realize [...] Read more.
Hydraulic oil is the key medium for the normal operation of hydraulic machinery, which carries various wear debris. The information reflected by the wear debris can be used to predict the early failure of equipment and achieve predictive maintenance. In order to realize the real-time condition monitoring of hydraulic oil, an impedance debris sensor that can detect inductance and resistance parameters is designed and studied in this paper. The material and size of wear debris can be discriminated based on inductance-resistance detection method. Silicon steel strips and two rectangular channels are designed in the sensor. The silicon steel strips are used to enhance the magnetic field strength, and the double rectangular detection channels can make full use of the magnetic field distribution region, thereby improving the detection sensitivity and throughput of the sensor. The comparison experiment shows that the coils in series are more suitable for the monitoring of wear debris. By comparing and analyzing the direction and the presence or absence of the signal pulses, the debris sensor can detect and distinguish 46 µm iron particles and 110 µm copper particles. This impedance detection method provides a new technical support for the high-precision distinguishing measurement of metal debris. The sensor can not only be used for oil detection in the laboratory, but also can be made into portable oil detection device for machinery health monitoring. Full article
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application, Volume III)
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10 pages, 3284 KiB  
Article
Improving the Detection Ability of Inductive Micro-Sensor for Non-Ferromagnetic Wear Debris
by Man Wang, Haotian Shi, Hongpeng Zhang, Dian Huo, Yucai Xie and Jun Su
Micromachines 2020, 11(12), 1108; https://doi.org/10.3390/mi11121108 - 15 Dec 2020
Cited by 8 | Viewed by 2182
Abstract
The inductive debris sensor has been studied because of its wide application prospects in mechanical health monitoring. In order to ensure a high-precision detection performance, a comprehensive method to improve the detection sensitivity and detection ability of the inductive sensor for non-ferromagnetic metal [...] Read more.
The inductive debris sensor has been studied because of its wide application prospects in mechanical health monitoring. In order to ensure a high-precision detection performance, a comprehensive method to improve the detection sensitivity and detection ability of the inductive sensor for non-ferromagnetic metal debris is proposed. Based on the characteristics of the eddy current inside the metal, the change of the coil impedance caused by the metal debris is increased by enhancing the magnetic field strength and selecting the optimal excitation frequency. The impedance detection method involving inductance and resistance parameters is used to improve the detection limit of non-ferromagnetic metal debris. The experimental results verify that the magnetic field in the detection region can be enhanced by adding a silicon steel strip (paramagnetic material) in the central hole of the coil, thereby greatly improving the detection sensitivity of the inductive sensor, and the concentrated distribution of the magnetic field avoids the double-peak signals generated by a single particle. The characteristics of the signal amplitude of non-ferromagnetic debris with excitation frequency are studied. Higher inductance, resistance amplitudes, and signal-to-noise ratio (SNR) can be obtained by using a high-frequency alternating current. Compared with inductance parameter detection, resistance parameter detection can detect smaller non-ferromagnetic debris. Combining the detection results of the inductance and resistance parameters can effectively improve the sensor’s ability to detect non-ferromagnetic debris. Full article
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application, Volume III)
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