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Micromachines
Special Issues
Micro/Nanomanufacturing and Cross-Scale Fabrication: Methods, Systems, and Applications
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Micro/Nanomanufacturing and Cross-Scale Fabrication: Methods, Systems, and Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: 31 July 2026 | Viewed by 2098

Special Issue Editors

Dr. Yanquan Geng

E-Mail Website
Guest Editor
Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China
Interests: micro and nano-engineering; nanofabrication; nanomechnaics/nanotribology; micro/nanofluidics; MEMS; nanowires
Special Issues, Collections and Topics in MDPI journals
Dr. Chenyang Zhao

E-Mail Website
Guest Editor
School of Mechanical Engineering and Automation, Harbin Institute of Technology (Shenzhen), Shenzhen 518055, China
Interests: precision measurement; ultra-precision machining
Special Issues, Collections and Topics in MDPI journals
Dr. Jiqiang Wang

E-Mail Website
Guest Editor
Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China
Interests: nanofabrication; nanofluidic chips; SERS
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Micro/nanomanufacturing and cross-scale fabrication technologies have become essential enabling tools for advanced devices and systems, spanning areas such as MEMS, flexible electronics, biomedical implants, and energy harvesting systems. These fabrication approaches are increasingly being adopted in high-precision industries, including in the production of semiconductor equipment, ultra-precision optics, and miniaturized sensors. However, significant scientific and technical challenges remain. Fabrication accuracy, reproducibility, and throughput are often difficult to balance, especially when scaling across multiple dimensions. Process integration of dissimilar materials, real-time monitoring at micro/nanoscales, and robustness under varying operational conditions also present persistent hurdles. This Special Issue aims to present recent advances in micro/nanomechanical manufacturing and cross-scale fabrication, with an emphasis on innovative methodologies, integrated systems, and real-world applications. We invite submissions of research papers, communications, and review articles focusing on the following: (1) novel processes and equipment for micro/nanomachining, additive micro-manufacturing, micro-formative manufacturing, hybrid subtractive–additive processes, and other cross-scale fabrication methods; (2) system-level developments including precision motion systems, in situ metrology, adaptive control strategies, and intelligent manufacturing platforms; and (3) application-oriented advances in MEMS, biomedical devices, photonic components, ultra-precision molds, and functional microstructures across consumer, industrial, aerospace, and medical sectors. Contributions that address scalability, sustainability, and industrial translation of micro/nanomanufacturing are particularly encouraged.

Dr. Yanquan Geng
Dr. Chenyang Zhao
Dr. Jiqiang Wang
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 250 words) can be sent to the Editorial Office for assessment.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • micro/nanofabrication
  • cross-scale fabrication
  • micro-formative manufacturing
  • intelligent manufacturing
  • functional micro/nanostructures

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Published Papers (3 papers)

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Research

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11 pages, 1844 KB  
Article
Fs-Ablated Trenches on the Surface of Microsphere for Whispering Gallery Modes Cleaning
by Hiba A. Rizk, Viktor A. Simonov, Vadim S. Terentyev, Vladislav E. Fedyaj, Andrey E. Simanchuk, Alexander V. Dostovalov and Sergey A. Babin
Micromachines 2026, 17(3), 381; https://doi.org/10.3390/mi17030381 - 21 Mar 2026
Viewed by 334
Abstract
This study addresses the problem of whispering gallery mode (WGM) selection in spherical microresonators by means of their femtosecond micro-processing. The proposed method involves fabrication on the microsphere surface of defects playing the role of scattering elements for higher-order modes with low azimuthal [...] Read more.
This study addresses the problem of whispering gallery mode (WGM) selection in spherical microresonators by means of their femtosecond micro-processing. The proposed method involves fabrication on the microsphere surface of defects playing the role of scattering elements for higher-order modes with low azimuthal mode indices. These two T-shaped trenches are created using femtosecond laser ablation, with a depth of 2 microns, gap of 30 microns between them, and each of length of 20 microns along the equatorial direction. A tapered fiber with a sub-micron waist diameter serves as the excitation element for WGMs. This method allows for spectral purification of the WGMs, reducing the number of resonances by 180 times, with a quality factor of Q>105 for the non-inverted spectrum in the form of resonance dips. Additionally, an inverted spectrum with narrow resonance peaks of about 35%, low background level and single mode regime with 3 dB side peak suppression has been simultaneously achieved in the taper transmission, for the first time to our knowledge. The latter was obtained by exciting the microsphere at the taper waist. These results hold promise for the development of narrowband filters, laser mode selectors, and optical sensors based on microresonators. Full article
(This article belongs to the Special Issue Micro/Nanomanufacturing and Cross-Scale Fabrication: Methods, Systems, and Applications)
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17 pages, 9582 KB  
Article
Fabrication of Wear-Resistant and Anti-Reflection Surfaces Based on Armor-Protected Nanocone Structures
by Haoyu Tian, Jianxun Chen, Jiaheng Bi, Haotian Guo, Cheng Lei and Ruirui Li
Micromachines 2026, 17(3), 360; https://doi.org/10.3390/mi17030360 - 15 Mar 2026
Viewed by 343
Abstract
Antireflection surfaces play an indispensable role in modern optics, with extensive applications covering optical windows and other precision optical components. The fabrication of anti-reflection surfaces frequently relies on micro/nano-structuring technologies. However, the fabricated micro/nanostructures typically experience performance degradation in transmission enhancement caused by [...] Read more.
Antireflection surfaces play an indispensable role in modern optics, with extensive applications covering optical windows and other precision optical components. The fabrication of anti-reflection surfaces frequently relies on micro/nano-structuring technologies. However, the fabricated micro/nanostructures typically experience performance degradation in transmission enhancement caused by abrasion during operation. To address this problem, we designed and fabricated a double-sided nanocone structure shielded by a protective armor layer. This armor layer efficiently prevents surface mechanical wear and preserves the nanocone structures, leading to almost constant transmittance of the anti-reflection surface even after abrasion. The anti-reflection surface was fabricated by first patterning a square grid armor on one side of fused silica via photolithography, followed by the preparation of an etching mask and nanocone structures using reactive ion etching (RIE). Nanocones were then fabricated on the opposite side of the substrate, finally forming the double-sided nanocone structure. The fabricated armor-protected double-sided nanocone structure exhibited an increase in the average transmittance from 93.43% to 98.31% within the wavelength range of 800–1200 nm. After abrasion testing under 10 MPa pressure, the nanocones under the protective armor showed almost no damage, and the average transmittance remained at approximately 97.85%, demonstrating the outstanding mechanical robustness of the proposed design. Full article
(This article belongs to the Special Issue Micro/Nanomanufacturing and Cross-Scale Fabrication: Methods, Systems, and Applications)
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Review

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25 pages, 7859 KB  
Review
Towards Ultra-Precision Manufacturing: Advancements and Future Trends in Energy Field-Assisted Jet Machining
by Yongzhen He, Ting’an Chen, Xinhua Man and Tonglu Su
Micromachines 2026, 17(4), 415; https://doi.org/10.3390/mi17040415 - 29 Mar 2026
Viewed by 437
Abstract
Jet machining is widely utilized in innovative technology industries, such as aerospace and semiconductors, due to its minimal thermal damage. However, with the increasingly stringent surface quality requirements of modern manufacturing, conventional jet technologies face limitations in achieving ultra-precision surface finishing and high [...] Read more.
Jet machining is widely utilized in innovative technology industries, such as aerospace and semiconductors, due to its minimal thermal damage. However, with the increasingly stringent surface quality requirements of modern manufacturing, conventional jet technologies face limitations in achieving ultra-precision surface finishing and high material removal rates. To address these challenges and adapt to this new situation, multi-energy field-assisted jet machining has emerged as a novel concept, integrating laser, ultrasonic, and magnetic fields. This paper reviews the scientific development and recent advancements of these hybrid technologies within the field of ultra-precision machining. The physical interaction mechanisms between the auxiliary energy fields and the waterjet are elucidated. Specifically, the effects of laser thermal softening, ultrasonic cavitation, and magnetic focusing on new mechanisms of material removal and surface topography are systematically analyzed. The process capabilities and applications of each method are evaluated. Finally, current technical challenges are identified, and the future trends in ultra-precision jet machining are discussed. Full article
(This article belongs to the Special Issue Micro/Nanomanufacturing and Cross-Scale Fabrication: Methods, Systems, and Applications)
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