Ultra-Precision Machining Technologies and Their Applications

Dear Colleagues,

Ultra-precision machining technology is a highly precise manufacturing process that aims to achieve microscopic- and even atomic-level control of the workpiece surface. This technology finds application in the precision machining, micromachining, and ultra-micromachining of various materials, including optical components, semiconductor devices, and biomedical instruments. Ultra-precision machining encompasses methods such as grinding, polishing, chemical mechanical polishing, ion beam machining, and laser machining. These techniques allow for precise control over surface topography, dimensions, and surface quality by adjusting machining parameters, tool design, and process flow. Utilizing ultra-precision modeling and simulation facilitates accurate control of the machining process, error compensation, a greater understanding of material science, measurement techniques, on-machine metrology, and advanced functional applications. This Special Issue aims to gather technologies and their applications in ultra-precision machining.

Dr. Chenyang Zhao
Dr. Chen Li
Guest Editors

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