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Applied Sciences
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Micro- and Nanomanufacturing: From Nanoscale Structures to Devices
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Micro- and Nanomanufacturing: From Nanoscale Structures to Devices

A special issue of Applied Sciences (ISSN 2076-3417). This special issue belongs to the section "Nanotechnology and Applied Nanosciences".

Deadline for manuscript submissions: closed (31 December 2023) | Viewed by 7973

Special Issue Editors

Dr. Christos Tsamis

E-Mail Website
Guest Editor
Institute of Nanoscience and Nanotechnology, NCSR “Demokritos”, Athens, Greece
Interests: micromachining technologies; microgenerators for energy harvesting; micromachined sensors (gas sensors)
Dr. Danijela Randjelović

E-Mail Website
Guest Editor
Department of Microelectronic Technologies, Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia
Interests: micromachined thermal sensors; gas sensors; vacuum sensors; flow sensors; atomic force microscopy; microbial fuel cells; analytical modeling; numerical modeling; intelligent transmitters

Special Issue Information

Dear Colleagues,

Micro- and nanomanufacturing has revolutionized the development of materials and nanostructures leading to new functionalities and devices with improved performance. The ability to control matter at the micro- and nanoscale has a profound impact on our society, resulting in innovative processes and products in a majority of fields including health and wellbeing, energy, environment, safety and security, among others. Simultaneously, several scientific and technological obstacles must be overcome to upscale laboratory-developed materials and devices to industrial production.

The purpose of this Special Issue is to present recent advancements in micro- and nanofabrication, both at the laboratory as well as the industrial level. Contributions on novel materials and processes as well as their application in nanoelectronic devices, sensors, energy harvesting, etc., are encouraged. Reviews concerning micro- and nanomanufacturing processes and applications as well as industrial processes and mass production are also welcome.

This Special Issue will publish high-quality, original research papers and the topics will include, but are not limited to:

  • Micro- and nanofabrication technologies (chemical/thermal, vapor-based deposition, solution-based techniques, self-assembly, 3D printing, etc.).
  • Zero-dimensional materials (quantum dots, nanoparticles, etc.).
  • One-dimensional nanostructures (nanowires, nanorods, nanotubes, etc.).
  • Two-dimensional materials (graphene, transition metal dichalcogenides (TMDs), etc.).
  • Three-dimensional materials (nanoporous materials, aerogels, nanostructured materials).
  • Nanostructuring of surfaces, including plasma processes, nanoimprint, etc.
  • Characterization of nanostructured materials and surfaces.
  • Integration of nanostructured materials and processes for device fabrication, including:
  • Nanoelectronic, photonic and plasmonic devices.
  • Microsensors including physical sensors and chemical sensors.
  • Energy harvesting, including piezoelectric, triboelectric, thermoelectric, etc.
  • Technology scale-up and commercialization issues.

We look forward to your contributions and we hope that this Special Issue will act as a forum for industrial and academic research groups working in the field of micro- and nanofabrication.

Kind regards,

Dr. Christos Tsamis
Dr. Danijela Randjelovic
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Applied Sciences is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • micro- and nanomanufacturing
  • zero-dimensional materials
  • one-dimensional nanostructures
  • two-dimensional materials
  • three-dimensional materials
  • nanoelectronic devices
  • microsensors
  • energy harvesting

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Further information on MDPI's Special Issue policies can be found here.

Published Papers (4 papers)

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Research

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12 pages, 7923 KiB  
Communication
Glycerol Flow through a Shielded Coil Induces Aggregation and Activity Enhancement of Horseradish Peroxidase
by Yuri D. Ivanov, Ivan D. Shumov, Andrey F. Kozlov, Maria O. Ershova, Anastasia A. Valueva, Irina A. Ivanova, Vadim Y. Tatur, Andrei A. Lukyanitsa, Nina D. Ivanova and Vadim S. Ziborov
Appl. Sci. 2023, 13(13), 7516; https://doi.org/10.3390/app13137516 - 26 Jun 2023
Cited by 1 | Viewed by 1613
Abstract
Glycerol has found its applications as a heat-transfer fluid in heat exchangers, and as a component of functional liquids in biosensor analysis. Flowing non-aqueous fluids are known to be able to induce electromagnetic fields due to the triboelectric effect. These triboelectrically generated electromagnetic [...] Read more.
Glycerol has found its applications as a heat-transfer fluid in heat exchangers, and as a component of functional liquids in biosensor analysis. Flowing non-aqueous fluids are known to be able to induce electromagnetic fields due to the triboelectric effect. These triboelectrically generated electromagnetic fields can affect biological macromolecules. Horseradish peroxidase (HRP) is widely employed as a convenient model object for studying how external electric, magnetic, and electromagnetic fields affect enzymes. Herein, we have studied whether the flow of glycerol in a ground-shielded cylindrical coil affects the HRP enzyme incubated at a 2 cm distance near the coil’s side. Atomic force microscopy (AFM) has been employed in order to study the effect of glycerol flow on HRP at the nanoscale. An increased aggregation of HRP on mica has been observed after the incubation of the enzyme near the coil. Moreover, the enzymatic activity of HRP has also been affected. The results reported that their application can be found in biotechnology, food technology and life sciences applications, considering the development of triboelectric generators, enzyme-based biosensors and bioreactors with surface-immobilized enzymes. Our work can also be of interest for scientists studying triboelectric phenomena, representing one more step toward understanding the mechanism of the indirect action of the flow of a dielectric liquid on biological macromolecules. Full article
(This article belongs to the Special Issue Micro- and Nanomanufacturing: From Nanoscale Structures to Devices)
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9 pages, 2008 KiB  
Communication
Sliding-Mode Active Disturbance Rejection Control for Electromagnetic Driven Compliant Micro-Positioning Platform
by Aihua Zhang, Jiqiang Song and Leijie Lai
Appl. Sci. 2023, 13(3), 1309; https://doi.org/10.3390/app13031309 - 18 Jan 2023
Cited by 2 | Viewed by 1551
Abstract
At the field of nanometer positioning and machining, high-precision tracking is a key technology of the micro-positioning platform which is driven by a voice coil motor. To improve the tracking accuracy and response speed, the sliding-mode active disturbance rejection control is proposed. The [...] Read more.
At the field of nanometer positioning and machining, high-precision tracking is a key technology of the micro-positioning platform which is driven by a voice coil motor. To improve the tracking accuracy and response speed, the sliding-mode active disturbance rejection control is proposed. The mathematical model of the micro-positioning platform control system is established, in which the perturbation and spring-damping force are set as the unknown terms, and an extended state observer is used to estimate and compensate for the unknown terms. To improve the robustness of the system, the equivalent sliding-mode term is constructed to replace the PD control term in the conventional active disturbance rejection. Further, the stability of the system is proved by the Lyapunov stability theory, and compared with the conventional sliding-mode controller, the effectiveness of the proposed control strategy is verified by simulation. Full article
(This article belongs to the Special Issue Micro- and Nanomanufacturing: From Nanoscale Structures to Devices)
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12 pages, 6377 KiB  
Article
Thermal Stability of Self-Assembled 3-Aminopropyltrimethoxysilane Diffusion Barrier Terminated by Carboxyl Groups
by Hongjin Liu, Mingkun Fu, Zhe Wang, Shaozhi Pang, Huaiqing Zhu, Chen Zhang, Lijun Ming, Xinyu Liu, Minghui Ding and Yudong Fu
Appl. Sci. 2022, 12(21), 11098; https://doi.org/10.3390/app122111098 - 2 Nov 2022
Viewed by 1827
Abstract
The carboxyl-terminated 3-aminopropyltrimethoxysilane (APTMS) self-assembled monolayer (SAM) diffusion barrier was prepared onto a Si substrate via molecular self-assembly and graft modification technology. The SAM was afterward coated with a copper film via radio-frequency (RF) magnetron sputtering. In order to study the thermal stability [...] Read more.
The carboxyl-terminated 3-aminopropyltrimethoxysilane (APTMS) self-assembled monolayer (SAM) diffusion barrier was prepared onto a Si substrate via molecular self-assembly and graft modification technology. The SAM was afterward coated with a copper film via radio-frequency (RF) magnetron sputtering. In order to study the thermal stability of the diffusion barrier, the sample was subsequently annealed for 60 min in an Ar environment at the temperatures of 350 °C, 400 °C, 450 °C, 500 °C, and 550 °C. The results revealed that carboxyl modification enabled one to increase the barrier breakdown temperature of the APTMS diffusion barrier layer by about 100 °C, which was sufficient to effectively inhibit the copper diffusion at 500 °C. Full article
(This article belongs to the Special Issue Micro- and Nanomanufacturing: From Nanoscale Structures to Devices)
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Review

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20 pages, 11401 KiB  
Review
A Review of Magnetoelectric Composites Based on ZnO Nanostructures
by Achilleas Bardakas, Andreas Kaidatzis and Christos Tsamis
Appl. Sci. 2023, 13(14), 8378; https://doi.org/10.3390/app13148378 - 20 Jul 2023
Cited by 3 | Viewed by 2309
Abstract
The recent advancements in magnetoelectric (ME) materials have enabled the development of functional magnetoelectric composites for sensor applications in the medical and engineering sectors, as well as in energy harvesting and material exploration. Magnetoelectric composites rely on the interaction between piezoelectric and magnetoelastic [...] Read more.
The recent advancements in magnetoelectric (ME) materials have enabled the development of functional magnetoelectric composites for sensor applications in the medical and engineering sectors, as well as in energy harvesting and material exploration. Magnetoelectric composites rely on the interaction between piezoelectric and magnetoelastic materials by coupling the magnetization-induced strain to the strain-generated potential of the piezoelectric phase. This creates an increased interest around the development of novel piezoelectric materials that not only possess favorable piezoelectric properties but also fulfill specific material criteria such as biocompatibility, bioactivity, ease of fabrication and low cost. ZnO, and its nanostructures, is one such material that has been employed in the magnetoelectric research due to its remarkable piezoelectric, semiconducting and optical properties. Thus, this article provides a comprehensive review of the available literature on magnetoelectric composites based on ZnO micro- and nanostructures, aiming to present a concise reference on the methods, applications and future prospects of ZnO-based ME composites. Specifically, a brief introduction is provided, presenting the current research interests around magnetoelectric composites, followed by a concise mention of the magnetoelectric effect and its key aspects. This is followed by separate sections describing the relevant research on ZnO magnetoelectric composites based on ZnO thin-films, either pure or doped, and nano- and microrods composites, as well as nano composites comprised of ZnO nanoparticles mixed with ferromagnetic nanoparticles. Finally, the future prospects and the extension of ME ZnO research into nanowire and nanorod composites are discussed. Full article
(This article belongs to the Special Issue Micro- and Nanomanufacturing: From Nanoscale Structures to Devices)
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