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Journal: Proceedings, 2018
Volume: 2
Number: 1024

Article: Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers
Authors: by Gabriele Bosetti, Johannes Manz, Ulrich Krumbein and Gabriele Schrag
Link: https://www.mdpi.com/2504-3900/2/13/1024

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