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Journal: Technologies, 2025
Volume: 13
Number: 11
Article:
Inhibition of Anti-Reflection Film Cracks on Plastic Substrates Using Nanolaminate Layer Deposition in Plasma-Enhanced Atomic Layer Deposition
Authors:
by
Chi-Chieh Wang, Cheng-Fu Wang, Meng-Chi Li, Li-Chen Su and Chien-Cheng Kuo
Link:
https://www.mdpi.com/2227-7080/13/1/11
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