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Journal: Electronics, 2021
Volume: 10
Number: 2632

Article: Impact of Residual Stress on a Polysilicon Channel in Scaled 3D NAND Flash Memory
Authors: by Juyoung Lee, Dong-Gwan Yoon, Jae-Min Sim and Yun-Heub Song
Link: https://www.mdpi.com/2079-9292/10/21/2632

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