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Journal: Coatings, 2019
Volume: 9
Number: 305
305
Article: Correlation of Impedance Matching and Optical Emission Spectroscopy during Plasma-Enhanced Chemical Vapor Deposition of Nanocrystalline Silicon Thin Films
Authors: by Li-Han Kau, Hung-Jui Huang, Hsueh-Er Chang, Yu-Lin Hsieh, Chien-Chieh Lee, Yiin-Kuen Fuh and Tomi T. Li
Link: https://www.mdpi.com/2079-6412/9/5/305

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