Yu, Z.; Shang, J.; Wang, Q.; Zheng, H.; Mei, H.; Zhao, D.; Liu, X.; Ding, J.; Zheng, J.
Influence of Si Content on the Microstructure and Properties of Hydrogenated Amorphous Carbon Films Deposited by Magnetron Sputtering Technique. Coatings 2025, 15, 793.
https://doi.org/10.3390/coatings15070793
AMA Style
Yu Z, Shang J, Wang Q, Zheng H, Mei H, Zhao D, Liu X, Ding J, Zheng J.
Influence of Si Content on the Microstructure and Properties of Hydrogenated Amorphous Carbon Films Deposited by Magnetron Sputtering Technique. Coatings. 2025; 15(7):793.
https://doi.org/10.3390/coatings15070793
Chicago/Turabian Style
Yu, Zhen, Jiale Shang, Qingye Wang, Haoxiang Zheng, Haijuan Mei, Dongcai Zhao, Xingguang Liu, Jicheng Ding, and Jun Zheng.
2025. "Influence of Si Content on the Microstructure and Properties of Hydrogenated Amorphous Carbon Films Deposited by Magnetron Sputtering Technique" Coatings 15, no. 7: 793.
https://doi.org/10.3390/coatings15070793
APA Style
Yu, Z., Shang, J., Wang, Q., Zheng, H., Mei, H., Zhao, D., Liu, X., Ding, J., & Zheng, J.
(2025). Influence of Si Content on the Microstructure and Properties of Hydrogenated Amorphous Carbon Films Deposited by Magnetron Sputtering Technique. Coatings, 15(7), 793.
https://doi.org/10.3390/coatings15070793
