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Journal: CoatingsVolume: 12Number: 130
Article: Dielectric Coating Deposition Regimes during Electron-Beam Evaporation of Ceramics in the Fore-Vacuum Pressure Range
- Authors:
- Yury G. Yushkov1,
- Efim M. Oks1,2 and
- Andrey V. Tyunkov1
- et al.
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