- Article
High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)
- Jian Liu,
- Youting Liang,
- Lang Gao,
- Chao Sun,
- Jianglin Guan,
- Zhe Wang,
- Zhaoxiang Liu,
- Zhiwei Fang,
- Min Wang and
- Haisu Zhang
- + 1 author
We demonstrate high-extraction-rate Ta2O5-core/SiO2-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fib...