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Journal: Nanomaterials, 2022
Volume: 12
Number: 3497
3497
Article: Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching
Authors: by William Chiappim, Benedito Botan Neto, Michaela Shiotani, Júlia Karnopp, Luan Gonçalves, João Pedro Chaves, Argemiro da Silva Sobrinho, Joaquim Pratas Leitão, Mariana Fraga and Rodrigo Pessoa
Link: https://www.mdpi.com/2079-4991/12/19/3497

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