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Journal: Nanomaterials, 2020
Volume: 10
Number: 2488
Article:
Fabrication of Low Cost and Low Temperature Poly-Silicon Nanowire Sensor Arrays for Monolithic Three-Dimensional Integrated Circuits Applications
Authors:
by
Siqi Tang, Jiang Yan, Jing Zhang, Shuhua Wei, Qingzhu Zhang, Junjie Li, Min Fang, Shuang Zhang, Enyi Xiong, Yanrong Wang, Jianglan Yang, Zhaohao Zhang, Qianhui Wei, Huaxiang Yin, Wenwu Wang and Hailing Tu
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