Article Versions Notes

Belaya SV, Maksimovsky EA, Shayapov VR, Shapovalova AA, Kolodin AN, Saraev AA, Asanov IP, Khomyakov MN, Yushina IV, Plekhanov AG, et al. Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization. Applied Sciences. 2023; 13(8):4959. https://doi.org/10.3390/app13084959

Belaya, Svetlana V., Eugene A. Maksimovsky, Vladimir R. Shayapov, Aleksandra A. Shapovalova, Alexey N. Kolodin, Andrey A. Saraev, Igor P. Asanov, Maxim N. Khomyakov, Irina V. Yushina, Aleksandr G. Plekhanov, and et al. 2023. "Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization" Applied Sciences 13, no. 8: 4959. https://doi.org/10.3390/app13084959

Belaya, S. V., Maksimovsky, E. A., Shayapov, V. R., Shapovalova, A. A., Kolodin, A. N., Saraev, A. A., Asanov, I. P., Khomyakov, M. N., Yushina, I. V., Plekhanov, A. G., Sulyaeva, V. S., & Kosinova, M. L. (2023). Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization. Applied Sciences, 13(8), 4959. https://doi.org/10.3390/app13084959