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Journal: Applied SciencesVolume: 11Number: 5358
Article: A Linear Microwave Plasma Source Using a Circular Waveguide Filled with a Relatively High-Permittivity Dielectric: Comparison with a Conventional Quasi-Coaxial Line Waveguide
- Authors:
- Ju-Hong Cha,
- Sang-Woo Kim and
- Ho-Jun Lee*
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