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Journal: Appl. Sci., 2020
Volume: 10
Number: 978

Article: Investigation of Airborne Molecular Contamination in Cleanroom Air Environment through Portable Soft X-Ray Radiolysis Detector
Authors: by Changhyuk Kim, Kyungil Cho and David Y. H. Pui
Link: https://www.mdpi.com/2076-3417/10/3/978

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