Next Article in Journal
On Plowing Frictional Behavior during Scratch Testing: A Comparison between Experimental and Theoretical/Numerical Results
Previous Article in Journal
Synthesis of NiMoO4/3D-rGO Nanocomposite in Alkaline Environments for Supercapacitor Electrodes
Article Menu
Issue 1 (January) cover image

Export Article

Open AccessArticle
Crystals 2019, 9(1), 32; https://doi.org/10.3390/cryst9010032

Single Crystal Diamond Deposited by Dual Radio-Frequency Plasma Jet CVD with High Growth Rate

College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
*
Author to whom correspondence should be addressed.
Received: 3 December 2018 / Revised: 24 December 2018 / Accepted: 6 January 2019 / Published: 10 January 2019
(This article belongs to the Special Issue Synthesis and Characterization of Diamond Crystals)
Full-Text   |   PDF [3006 KB, uploaded 10 January 2019]   |  

Abstract

Single crystal diamonds were deposited on high pressure high temperature (HPHT) substrate with high growth rate, up to 18.5 μm/h, by using dual radio-frequency inductive coupled plasma jet. The methane flux was found to influence the growth rate of single crystal diamond. The reason for this might be ascribed to the electron temperature increase, raising the flux of methane, based on the plasma diagnosis results by optical emission spectra (OES). The results of Raman spectroscopy and the X-ray rocking-curve indicated that as-deposited diamonds are of good quality. View Full-Text
Keywords: dual radio frequency; inductive coupled plasma jet; single crystal diamond; chemical vapor deposition (CVD); methane flux; growth rate dual radio frequency; inductive coupled plasma jet; single crystal diamond; chemical vapor deposition (CVD); methane flux; growth rate
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Liu, H.; Li, J.-J.; Li, Z.-R.; Xu, K.; Chen, Z.-J.; Chen, G.-C. Single Crystal Diamond Deposited by Dual Radio-Frequency Plasma Jet CVD with High Growth Rate. Crystals 2019, 9, 32.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Crystals EISSN 2073-4352 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top