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Journal: Crystals, 2020
Volume: 10
Number: 842

Article: Development of Catalytic-CVD SiNx Passivation Process for AlGaN/GaN-on-Si HEMTs
Authors: by Myoung-Jin Kang, Hyun-Seop Kim, Ho-Young Cha and Kwang-Seok Seo
Link: https://www.mdpi.com/2073-4352/10/9/842

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