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Micromachines, Volume 17, Issue 1

2026 January - 144 articles

Cover Story: This cover highlights a CMOS-compatible photovoltaic microgenerator designed for on-chip energy harvesting in MEMS and IoT systems. The device employs a mesh-patterned p–n junction architecture to increase effective junction density and enhance carrier collection efficiency. By selectively removing the surface silicon dioxide layer, direct illumination of the junction regions is achieved, reducing optical losses and improving photocurrent generation. Fabricated using a standard CMOS process with a post-processing step, the proposed microgenerator demonstrates efficient light-to-electricity conversion. This work illustrates a scalable and integrable photovoltaic solution for self-powered microsystems. View this paper
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Micromachines - ISSN 2072-666X
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