Micromachines

4 pages, 199 KB

Open AccessEditorial

Future Development Strategy of Piezoelectric Devices

by Kenji Uchino

Micromachines 2026, 17(1), 145; https://doi.org/10.3390/mi17010145 - 22 Jan 2026

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Firstly, the five key development trends in the field of piezoelectric materials are discussed to offer the present perspective: “Performance to Reliability,” “Hard to Soft,” “Macro to Nano,” “Homo to Hetero,” and “Single to Multi-functional [...] Full article

(This article belongs to the Section A：Physics)

16 pages, 4501 KB

Open AccessArticle

Millimeter-Level MEMS Actuators Based on Multi-Folded Beams and Harmful Mode-Suppression Structures

by Hangyu Zhou, Wei Bian and Rui You

Micromachines 2026, 17(1), 144; https://doi.org/10.3390/mi17010144 - 22 Jan 2026

Viewed by 185

Abstract

Module-level free-space optical interconnects require actuators to combine both large stroke and high stability. To address this core trade-off that plagues traditional folded-beam actuators, we have developed a millimeter-scale MEMS electromagnetic actuator integrating a Differential Motion Rejection (DMR) unit with a rigid frame. [...] Read more.

Module-level free-space optical interconnects require actuators to combine both large stroke and high stability. To address this core trade-off that plagues traditional folded-beam actuators, we have developed a millimeter-scale MEMS electromagnetic actuator integrating a Differential Motion Rejection (DMR) unit with a rigid frame. Its performance was systematically evaluated through magnetic–structural coupling modeling, finite element simulation, and experiments. The actuator achieved millimeter-scale stroke under sinusoidal drive, with a primary resonant frequency of approximately 31 Hz. The introduction of the DMR and frame proved highly effective: the out-of-plane displacement at resonance was reduced by about 97%, the static Z-direction stiffness increased by over 50 times, and the displacement crosstalk decreased to 0.265%. Optical testing yielded a stable deflection angle of approximately ±21°. These results demonstrate that this design successfully combines large stroke with high stability, significantly suppressing out-of-plane parasitic motion and crosstalk, making it suitable for module-level optical interconnect systems with stringent space and stability requirements. Full article

(This article belongs to the Collection Optical MEMS: Design, Fabrication, Control, Modeling and Developments)

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17 pages, 3961 KB

Open AccessArticle

Influence Mechanism of Quantization Error on the Key Parameters of the Whole-Angle Hemisphere Resonator Gyroscope

by Xiuyue Yan, Jingyu Li, Pengbo Xiao, Tao Xia, Xingyuan Tang, Yao Pan, Kaiyong Yang and Hui Luo

Micromachines 2026, 17(1), 143; https://doi.org/10.3390/mi17010143 - 22 Jan 2026

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Abstract

The whole-angle hemispherical resonator gyroscope (WA-HRG) is critical to high-precision attitude control and navigational positioning, boasting significant deployment potential in both highly dynamic inertial navigation systems and industrial instrumentation. This paper presents a mechanistic analysis of quantization error inherent to the HRG’s hardware [...] Read more.

The whole-angle hemispherical resonator gyroscope (WA-HRG) is critical to high-precision attitude control and navigational positioning, boasting significant deployment potential in both highly dynamic inertial navigation systems and industrial instrumentation. This paper presents a mechanistic analysis of quantization error inherent to the HRG’s hardware detection and driving circuits, focusing specifically on its impact on parameter calculation and driving control in whole-angle mode. Furthermore, a simulation platform was constructed to verify and elucidate the correlations between the effects of quantization error and key resonator parameters, such as the major axis amplitude and the standing wave azimuth. Compared to existing HRG error studies which frame quantization error as isolated circuit noise, this work uniquely uncovers the azimuth-modulated periodic behavior of quantization error within the WA-HRG. It also formalizes a quantitative relationship between quantization error and the resonator’s key parameters, laying a critical theoretical foundation for suppressing quantization error and enhancing accuracy in high-performance WA-HRGs. Full article

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12 pages, 3014 KB

Open AccessArticle

The Application of High-Performance Silver Nanowire and Metal Oxide Composite Electrodes as Window Electrodes in Electroluminescent Devices

by Xingzhen Yan, Ziyao Niu, Mengying Lyu, Yanjie Wang, Fan Yang, Chao Wang, Yaodan Chi and Xiaotian Yang

Micromachines 2026, 17(1), 141; https://doi.org/10.3390/mi17010141 - 22 Jan 2026

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Abstract

In this paper, composite structures were fabricated by incorporating silver nanowires (AgNWs) with various metal oxides via the sol–gel method. This approach enhanced the electrical performance of AgNW-based transparent electrodes while simultaneously improving their stability under damp heat conditions and modifying the local [...] Read more.

In this paper, composite structures were fabricated by incorporating silver nanowires (AgNWs) with various metal oxides via the sol–gel method. This approach enhanced the electrical performance of AgNW-based transparent electrodes while simultaneously improving their stability under damp heat conditions and modifying the local medium environment surrounding the AgNW meshes. The randomly distributed AgNW meshes fabricated via drop-coating were treated with plasma to remove surface organic residues and reduce the inter-nanowire contact resistance. Subsequently, a zinc oxide (ZnO) coating was applied to further decrease the sheet resistance (R_sheet) value. The pristine AgNW mesh exhibits an R_sheet of 17.4 ohm/sq and an optical transmittance of 93.06% at a wavelength of 550 nm. After treatment, the composite structure achieves a reduced R_sheet of 8.7 ohm/sq while maintaining a high optical transmittance of 92.20%. The use of AgNW meshes as window electrodes enhances electron injection efficiency and facilitates the coupling mechanism between localized surface plasmon resonances and excitons. Compared with conventional ITO transparent electrodes, the incorporation of the AgNW mesh leads to a 17-fold enhancement in ZnO emission intensity under identical injection current conditions. Moreover, the unique scattering characteristics of the AgNW and metal oxide composite structure effectively reduce photon reflection at the device interface, thereby broadening the angular distribution of emitted light in electroluminescent devices. Full article

(This article belongs to the Special Issue Energy Conversion Materials/Devices and Their Applications, 2nd Edition)

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18 pages, 7072 KB

Open AccessArticle

Design of MEMS Microphone Array Integrated System for Pipeline Leakage Detection

by Kaixuan Wang, Yong Yang, Daoguang Liu, Di Song and Xiaoli Zhao

Micromachines 2026, 17(1), 140; https://doi.org/10.3390/mi17010140 - 22 Jan 2026

Viewed by 195

Abstract

Pressure pipelines are widely used in the energy and transportation fields for conveying natural gas, water, etc. Under complex and harsh conditions with long-term operation, this easily leads to leakage, threatening the safe and stable operation of transportation systems. Although acoustic sensors support [...] Read more.

Pressure pipelines are widely used in the energy and transportation fields for conveying natural gas, water, etc. Under complex and harsh conditions with long-term operation, this easily leads to leakage, threatening the safe and stable operation of transportation systems. Although acoustic sensors support non-destructive leakage detection, their accuracy is restricted by noise interference and minor leakage uncertainties, and existing systems lack a targeted integration design for pipeline scenarios. To address this, the micro-electromechanical system (MEMS) is specifically designed as an MEMS microphone array integrated system (MEMS-MAIS), which is applied for pipeline leakage detection through data fusion at different levels. First, a dedicated MEMS microphone array system is designed to realize high-sensitivity collection of leakage acoustic data. In addition, the integrated feature extraction and feature-level fusion modules are proposed to retain effective information, and a decision-level fusion module is incorporated to improve the reliability of leakage detection results. To verify the designed system, an experiential platform is established with several microphone data. The results indicate that the proposed MEMS-MAIS exhibits excellent anti-interference performance and leakage detection accuracy of 94.67%. It provides a reliable integrated system solution for pipeline leakage detection and verifying high engineering application value. Full article

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14 pages, 3687 KB

Open AccessFeature PaperArticle

Flexible Mesh-Structured Single-Walled Carbon Nanotube Thermoelectric Generators with Enhanced Heat Dissipation for Wearable Applications

by Hiroto Nakayama, Takuya Amezawa, Yuta Asano, Shuya Ochiai, Keisuke Uchida, Yuto Nakazawa and Masayuki Takashiri

Micromachines 2026, 17(1), 139; https://doi.org/10.3390/mi17010139 - 22 Jan 2026

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Abstract

Thermoelectric generators (TEGs) based on single-walled carbon nanotubes (SWCNTs) offer a promising approach for powering sensors in wearable systems. However, achieving high performance remains challenging because the high thermal conductivity of SWCNTs limits the temperature gradient within the device. We previously developed flexible [...] Read more.

Thermoelectric generators (TEGs) based on single-walled carbon nanotubes (SWCNTs) offer a promising approach for powering sensors in wearable systems. However, achieving high performance remains challenging because the high thermal conductivity of SWCNTs limits the temperature gradient within the device. We previously developed flexible SWCNT-TEGs with enhanced heat dissipation by dip-coating SWCNTs onto mesh sheets; however, their performance in real wearable environments had not been evaluated. In this study, we demonstrate the practical operation of these SWCNT-TEGs under conditions such as fingertip contact and cap-based wear. The output voltage increased proportionally with the number of fingers touching the device, and a stable voltage of 6.1 mV was obtained when the TEG was mounted on a cap and worn outdoors at 7 °C. These findings highlight the promising potential of flexible SWCNT-TEGs as power sources for next-generation wearable technologies, including human–computer interaction and health monitoring. Full article

(This article belongs to the Special Issue Manufacturing and Application of Advanced Thin-Film-Based Device)

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14 pages, 2797 KB

Open AccessArticle

Research on Stress Variations During the 4H-SiC Indentation Process

by Wenshan Wang, Shuixing Lin, Yiqing Yu and Nian Duan

Micromachines 2026, 17(1), 138; https://doi.org/10.3390/mi17010138 - 22 Jan 2026

Viewed by 107

Abstract

In order to explore the effect of stress on the damage of 4H-SiC materials, this paper employed single abrasive grain indentation simulation based on the Smoothed-Particle Hydrodynamics (SPH) method, and verified the accuracy of the indentation model through an indentation experiment on a [...] Read more.

In order to explore the effect of stress on the damage of 4H-SiC materials, this paper employed single abrasive grain indentation simulation based on the Smoothed-Particle Hydrodynamics (SPH) method, and verified the accuracy of the indentation model through an indentation experiment on a single abrasive grain. The research examined the consequences of varying pressures on the processing of 4H-SiC, including parameters such as the depth of abrasive grain penetration, the stress-affected region, and the initiation and propagation of cracks. Subsequently, mathematical models were developed to characterize stress variations under different pressure conditions. The findings reveal several vital insights: First, a discernible linear relationship exists between the depth of abrasive grain penetration into 4H-SiC and the applied pressure. Second, within a specific pressure range, the stress-affected zone within the workpiece enlarges as the applied pressure increases. However, when cracks form within the workpiece, the dimensions of the stress-affected zone exhibit fluctuations. During the abrasive grain indentation phase, a discernible pattern emerges in the stress distribution within the workpiece. Full article

(This article belongs to the Section D：Materials and Processing)

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15 pages, 6829 KB

Open AccessArticle

RF Energy Harvesting–Aided IoT Network: System Design and Prototype Implementation

by Yang Wang and Hangyi Chen

Micromachines 2026, 17(1), 137; https://doi.org/10.3390/mi17010137 - 22 Jan 2026

Viewed by 399

Abstract

As more and more Internet of Things (IoT) devices are widely deployed, the issue of energy supply for these devices is becoming increasingly prominent. Considering not only the wireless information transfer (WIT) function of traditional IoT networks but also the characteristics of wireless [...] Read more.

As more and more Internet of Things (IoT) devices are widely deployed, the issue of energy supply for these devices is becoming increasingly prominent. Considering not only the wireless information transfer (WIT) function of traditional IoT networks but also the characteristics of wireless power transfer (WPT), an RF energy harvesting–aided IoT network is proposed in this paper. In the new IoT network, a WPT transmitter and a WPT receiver are, respectively, introduced to the new gateway and the new end-device. A WPT transmitter is mainly composed of an antenna selection circuit, a power amplifier, and a directional antenna. A WPT receiver consists of a directional antenna, a matching network, a rectification circuit, and an energy management circuit. In order to coordinate WPT and WIT in an orderly manner and minimize WPT’s interference on WIT, a time-division scheme is adopted. The proposed new IoT network aims to offer a new IoT scheme combining both WIT and WPT technologies. In addition, IoT devices can obtain a new energy supply through RF energy harvesting. Both the effectiveness and efficiency of the proposed RF energy harvesting–aided IoT network have been validated through experimentation. Full article

(This article belongs to the Special Issue Micro-Energy Harvesting Technologies and Self-Powered Sensing Systems)

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12 pages, 4245 KB

Open AccessArticle

The Influence of Mask Modification on Microneedle Strength in Deep X-Ray Lithography

by Jie Wang, Yigui Li and Lin Du

Micromachines 2026, 17(1), 136; https://doi.org/10.3390/mi17010136 - 22 Jan 2026

Viewed by 140

Abstract

Hollow microneedle arrays of different shapes were prepared for blood collection and precise drug delivery. This microneedle array was investigated using shape modification and hole position optimization, and different approaches to increase the strength of the microneedles and hole alignment were analyzed. Firstly, [...] Read more.

Hollow microneedle arrays of different shapes were prepared for blood collection and precise drug delivery. This microneedle array was investigated using shape modification and hole position optimization, and different approaches to increase the strength of the microneedles and hole alignment were analyzed. Firstly, solid-tip microneedles were prepared using deep X-ray lithography, and an approach to increase the strength of microneedles by modifying the shape of the photomask was examined. Secondly, photomasks with holes in different positions were designed, and the exposure was aligned at different hole positions. Finally, the maximum stress and minimum displacement were analyzed using ANSYS 10.0 simulation software, while the proof-of-strength properties were accomplished by inserting microneedles into a polyimide film. The experimental results show that the modification of the shape of the photomask can increase the strength of the microneedles and compensate for the shortcomings generated by the moving exposure. Placing the holes away from the center of the tip can increase the flow rate of the microneedles. A horizontal offset of 30 μm and a vertical offset of 50 μm from the center of the microneedle tip were determined to be the best positions for aligning the holes. This meets the requirements for microneedle strength and sharpness. Full article

(This article belongs to the Special Issue Flexible and Wearable Sensors, 4th Edition)

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14 pages, 42038 KB

Open AccessArticle

Three-Dimensional Combustion Field Temperature Measurement Based on Planar Array Sensors

by Xiaodong Huang, Zhiling Li, Jia Wang, Wei Zhang, Yang Liu, Xiaoyong Zhang and Yanan Bao

Micromachines 2026, 17(1), 135; https://doi.org/10.3390/mi17010135 - 22 Jan 2026

Viewed by 156

Abstract

High-resolution three-dimensional temperature fields are essential for studying flame combustion, and tunable diode laser absorption tomography (TDLAT) is an effective method for diagnosing flame combustion conditions. In actual combustion measurements, the reliance of TDLAT on line-of-sight (LOS) measurements leads to limited data and [...] Read more.

High-resolution three-dimensional temperature fields are essential for studying flame combustion, and tunable diode laser absorption tomography (TDLAT) is an effective method for diagnosing flame combustion conditions. In actual combustion measurements, the reliance of TDLAT on line-of-sight (LOS) measurements leads to limited data and reduced dimensionality in analyzing combustion fields. This study proposes a method using area-array sensor-coupled absorption spectroscopy to measure the three-dimensional temperature field of flame accurately, aiming for enhanced combustion diagnosis. The laser beam is configured into a cone shape, and after traversing the combustion field under examination, the area-array sensor receives a projection signal. This signal is then used to reconstruct a high-resolution, multidimensional temperature field. We confirmed the accuracy and robustness of the algorithm through numerical simulations and compared these with experimental results from the TDLAT setup. Our TDLAT detection system demonstrates high precision and effectively measures temperature fields in complex flame imaging scenarios. Full article

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17 pages, 19260 KB

Open AccessArticle

Microstructure and Properties of Conventional Cast Versus Annular Laser-Clad Babbitt Alloy Layers for Sliding Bearings

by Jing Jin, Jun Ye, Hao Xue, Yongli Xu, Zhongwai Guo, Zhenghong Zhou, Gaohuan Xu and Guobiao Wang

Micromachines 2026, 17(1), 134; https://doi.org/10.3390/mi17010134 - 21 Jan 2026

Viewed by 300

Abstract

Sliding bearing alloy layers must combine excellent tribological performance with reliable metallurgical bonding, but conventional fabrication methods often suffer from coarse grains, chemical segregation and poor interface adhesion. Annular coaxial laser wire-feed cladding, by providing more uniform heat input and rapid solidification, is [...] Read more.

Sliding bearing alloy layers must combine excellent tribological performance with reliable metallurgical bonding, but conventional fabrication methods often suffer from coarse grains, chemical segregation and poor interface adhesion. Annular coaxial laser wire-feed cladding, by providing more uniform heat input and rapid solidification, is expected to mitigate these deficiencies; however, systematic studies of this technique applied to tin-based Babbitt alloy layers remain limited. In this work, Babbitt layers produced by conventional casting and by annular coaxial laser wire-feed cladding were compared in terms of microstructure, phase constitution, hardness and tribological behavior. The results indicate that laser cladding can produce continuous, dense and well-bonded coatings and markedly refine the SnSb phase, reducing grain size from approximately 100 μm in the cast material to 10-20 μm. Hardness increased from 25.3 HB to 27.6 HB, while tribological performance improved substantially: the coefficient of friction decreased by about 38.19% and the wear volume was reduced by approximately 10.46%. These improvements are attributed mainly to the rapid solidification, low dilution and more uniform phase distribution associated with annular coaxial laser cladding, demonstrating the strong potential of this process for fabricating high-performance tin-based Babbitt bearing layers. Full article

(This article belongs to the Section D：Materials and Processing)

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11 pages, 5308 KB

Open AccessArticle

Tunable Wavelength-Multiplexed Dual-Frequency Bound Pulse in a Carbon-Nanotube-Based Fiber Laser

by Lin Wang, Guoqing Hu, Yan Wang, Guangwei Chen, Liang Xuan, Zhehai Zhou and Jun Yu

Micromachines 2026, 17(1), 133; https://doi.org/10.3390/mi17010133 - 20 Jan 2026

Viewed by 236

Abstract

We experimentally and theoretically demonstrate coexistence of three different wavelength-multiplexed bound dual-frequency pulses in an all-fiber mode-locked fiber laser, effectively achieved by exploiting polarization-dependent loss effects and two uneven gain peaks of Er-doped fiber. With the single wall carbon-nanotube-based intensity modulation, wavelength-multiplexed dual-frequency [...] Read more.

We experimentally and theoretically demonstrate coexistence of three different wavelength-multiplexed bound dual-frequency pulses in an all-fiber mode-locked fiber laser, effectively achieved by exploiting polarization-dependent loss effects and two uneven gain peaks of Er-doped fiber. With the single wall carbon-nanotube-based intensity modulation, wavelength-multiplexed dual-frequency pulses located at 1531.1 nm and 1556.6 nm are obtained. Changing the polarization rotation angles in the fiber cavity, one of the two asynchronous pulses evolves into a bound state of a doublet, in which the center wavelength of the bound solitons is centered at ~1530 nm or ~1556 nm. The relative phase between the two bound solitons or modulation depth of bound solitons can be switched by a polarization controller. A simulation method based on coupled Ginzburg–Landau equations is provided to characterize the laser physics and understand the mechanism behind the dynamics of tuning between different bound dual-frequency pulses. The proposed fiber laser will provide a potential way to understand multiple soliton dynamics and implementation in optical frequency combs generation. Full article

(This article belongs to the Special Issue Integrated Photonics and Optoelectronics, 2nd Edition)

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16 pages, 4798 KB

Open AccessArticle

Total Ionizing Dose Effect Simulation Study on 130 nm CMOS Processor

by Yi Liu, Yuchen Liu, Xinfang Liao, Changqing Xu, Yangchen He and Yintang Yang

Micromachines 2026, 17(1), 132; https://doi.org/10.3390/mi17010132 - 20 Jan 2026

Viewed by 295

Abstract

This paper reports the results of a system-level total ionizing dose (TID) effect simulation study on a SMIC 130 nm LEON2 processor. Firstly, the device-level simulations of the 130 nm NMOS transistors are performed using the Sentaurus TCAD software to analyze the effects [...] Read more.

This paper reports the results of a system-level total ionizing dose (TID) effect simulation study on a SMIC 130 nm LEON2 processor. Firstly, the device-level simulations of the 130 nm NMOS transistors are performed using the Sentaurus TCAD software to analyze the effects of a bias condition, channel width, and irradiation dose on a TID-induced leakage current. Based on the TCAD simulation results, a Verilog-A-based compact model is developed for NMOS transistors to describe the TID-induced leakage current, and it is then embedded into target nodes of the SPICE netlist for the LEON2 processor, enabling system-level TID simulations. The simulation results reveal the processor’s failure threshold and corresponding failure mechanism; meanwhile, the increase in the power supply current with the irradiation dose is also observed. The research reported in this paper can provide beneficial guidance for radiation performance evaluation and radiation hardening by design (RHBD) in 130 nm bulk CMOS processors. Full article

(This article belongs to the Section D1: Semiconductor Devices)

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13 pages, 2539 KB

Open AccessArticle

Research on a Self-Powered Vibration Sensor for Coal Mine In Situ Stress Fracturing Drilling

by Jiangbin Liu, Mingzhong Li, Chuan Wu, Xianhong Shen and Yanjun Feng

Micromachines 2026, 17(1), 131; https://doi.org/10.3390/mi17010131 - 20 Jan 2026

Viewed by 272

Abstract

In the process of in situ stress fracturing drilling in coal mines, obtaining downhole vibration data not only improves drilling efficiency but also plays a key role in ensuring operational safety. Nevertheless, the energy supply techniques used in current vibration detectors reduce operational [...] Read more.

In the process of in situ stress fracturing drilling in coal mines, obtaining downhole vibration data not only improves drilling efficiency but also plays a key role in ensuring operational safety. Nevertheless, the energy supply techniques used in current vibration detectors reduce operational performance and escalate excavation expenses. This research proposes a self-powered vibration sensor based on the triboelectric nanogenerator, designed for the operational environment of coal mine in situ stress fracturing drilling. It can simultaneously detect axial and lateral vibration frequencies, and the inclusion of redundant sensing units provides the sensor with high reliability. Experimental outcomes demonstrate that the device functions across a frequency span of 0 to 11 Hz, maintaining error margins for frequency and amplitude under 4%. Furthermore, it functions reliably in environments where temperatures are under 150 °C and humidity is under 90%, proving its strong resilience to environmental factors. In addition, the device possesses self-generating potential, achieving a maximum voltage of 68 V alongside an output current of 51 nA. When connected to a 6 × 10⁷ Ω load, the maximum output power can reach 3.8 × 10⁻⁷ W. Unlike traditional subsurface oscillation detectors, the proposed unit combines self-generation capabilities with highly reliable measurement characteristics, making it more suitable for practical drilling needs. Full article

(This article belongs to the Special Issue Micro-Energy Harvesting Technologies and Self-Powered Sensing Systems)

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11 pages, 538 KB

Open AccessArticle

Metamaterial Incident Photon Reconstruction Theory Based on Resonant Dipole Phase

by Boli Xu and Renbin Zhong

Micromachines 2026, 17(1), 130; https://doi.org/10.3390/mi17010130 - 20 Jan 2026

Viewed by 260

Abstract

In this study, a Metamaterial Incident Photon Reconstruction Theory (MIPRT) is developed to describe the modulation process of metamaterials on incident photons. The theory includes the Invariant Incident Photon Hypothesis and Resonant Phase Deconstruction and Quantification; it reveals the modulation characteristics of metamaterials [...] Read more.

In this study, a Metamaterial Incident Photon Reconstruction Theory (MIPRT) is developed to describe the modulation process of metamaterials on incident photons. The theory includes the Invariant Incident Photon Hypothesis and Resonant Phase Deconstruction and Quantification; it reveals the modulation characteristics of metamaterials on incident photons, not by first absorption and then re-emission but by inducing coherent destructive interference, which brings about redistribution of the spatial probability of photon occurrence. This theory is validated in a single-layer metamaterial, and a unique relationship between the resonant phase and amplitude is derived and confirmed by simulation. The proposed MIPRT brings a comprehensive understanding of the electromagnetic (EM) response characteristics of metamaterials and provides a new idea for metamaterial theory from another perspective. Full article

(This article belongs to the Special Issue Broadband Terahertz Devices and Communication Technologies, 2nd Edition)

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20 pages, 5655 KB

Open AccessFeature PaperEditor’s ChoiceArticle

Structure Design Optimization of a Differential Capacitive MEMS Accelerometer Based on a Multi-Objective Elitist Genetic Algorithm

by Dongda Yang, Yao Chu, Ruitao Liu, Xiwen Zhang, Saifei Yuan, Fan Zhang, Shengjie Xuan, Yunzhang Chi, Jiahui Liu, Zetong Lei and Rui You

Micromachines 2026, 17(1), 129; https://doi.org/10.3390/mi17010129 - 19 Jan 2026

Viewed by 442

Abstract

This article describes a global structure optimization methodology for microelectromechanical system devices based on a multi-objective elitist genetic algorithm. By integrating a parameterized model with a multi-objective evolutionary framework, the approach can efficiently explore design space and concurrently optimize multiple metrics. A differential [...] Read more.

This article describes a global structure optimization methodology for microelectromechanical system devices based on a multi-objective elitist genetic algorithm. By integrating a parameterized model with a multi-objective evolutionary framework, the approach can efficiently explore design space and concurrently optimize multiple metrics. A differential capacitive MEMS accelerometer is presented to demonstrate the method. Four key objectives, including resonant frequency, static capacitance, dynamic capacitance, and feedback force, are simultaneously optimized to enhance sensitivity, bandwidth, and closed-loop driving capability. After 25 generations, the algorithm converged to a uniformly distributed Pareto front. The experimental results indicate that, compared with the initial design, the sensitivity-oriented design achieves a 56.1% reduction in static capacitance and an 85.5% improvement in sensitivity. The global multi-objective optimization achieves a normalized hypervolume of 35.8%, notably higher than the local structure optimization, demonstrating its superior design space coverage and trade-off capability. Compared to single-objective optimization, the multi-objective approach offers a superior strategy by avoiding the limitation of overemphasizing resonant frequency at the expense of other metrics, thereby enabling a comprehensive exploration of the design space. Full article

(This article belongs to the Special Issue Artificial Intelligence for Micro Inertial Sensors)

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20 pages, 3262 KB

Open AccessArticle

Glass Fall-Offs Detection for Glass Insulated Terminals via a Coarse-to-Fine Machine-Learning Framework

by Weibo Li, Bingxun Zeng, Weibin Li, Nian Cai, Yinghong Zhou, Shuai Zhou and Hao Xia

Micromachines 2026, 17(1), 128; https://doi.org/10.3390/mi17010128 - 19 Jan 2026

Viewed by 230

Abstract

Glass-insulated terminals (GITs) are widely used in high-reliability microelectronic systems, where glass fall-offs in the sealing region may seriously degrade the reliability of the microelectronic component and further degrade the device reliability. Automatic inspection of such defects is challenging due to strong light [...] Read more.

Glass-insulated terminals (GITs) are widely used in high-reliability microelectronic systems, where glass fall-offs in the sealing region may seriously degrade the reliability of the microelectronic component and further degrade the device reliability. Automatic inspection of such defects is challenging due to strong light reflection, irregular defect appearances, and limited defective samples. To address these issues, a coarse-to-fine machine-learning framework is proposed for glass fall-off detection in GIT images. By exploiting the circular-ring geometric prior of GITs, an adaptive sector partition scheme is introduced to divide the region of interest into sectors. Four categories of sector features, including color statistics, gray-level variations, reflective properties, and gradient distributions, are designed for coarse classification using a gradient boosting decision tree (GBDT). Furthermore, a sector neighbor (SN) feature vector is constructed from adjacent sectors to enhance fine classification. Experiments on real industrial GIT images show that the proposed method outperforms several representative inspection approaches, achieving an average IoU of 96.85%, an F1-score of 0.984, a pixel-level false alarm rate of 0.55%, and a pixel-level missed alarm rate of 35.62% at a practical inspection speed of 32.18 s per image. Full article

(This article belongs to the Special Issue Emerging Technologies and Applications for Semiconductor Industry)

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17 pages, 3126 KB

Open AccessFeature PaperEditor’s ChoiceArticle

A Multifunctional Peptide Linker Stably Anchors to Silica Spicules and Enables MMP-Responsive Release of Diverse Bioactive Cargos

by So-Hyung Lee, Suk-Hyun Kwon, Byung-Ho Song, In-Gyeong Yeo, Hyun-Seok Park, A-Ri Kim, Lee-Seul Kim, Ji-Min Noh, Hee-Jung Choi, Da-Jeoung Lim and Young-Wook Jo

Micromachines 2026, 17(1), 127; https://doi.org/10.3390/mi17010127 - 19 Jan 2026

Viewed by 283

Abstract

Silica spicules provide a natural transdermal conduit but require a linker that binds strongly under physiological conditions and releases payloads selectively in response to biological cues. Existing silane chemistries or polydopamine coatings lack enzyme responsiveness and show limited control over release. We created [...] Read more.

Silica spicules provide a natural transdermal conduit but require a linker that binds strongly under physiological conditions and releases payloads selectively in response to biological cues. Existing silane chemistries or polydopamine coatings lack enzyme responsiveness and show limited control over release. We created a 180-member peptide library with the motif L–X1–X2–[Y–F–Y]–A–L–G–P–H–C and screened for silica binding. Biophysical assays (circular dichroism, ζ-potential, quartz crystal microbalance, atomic force microscopy) and molecular dynamics identified high-affinity binders. The lead, P176, was tested for matrix metalloprotease (MMP)-responsive cleavage. Conjugation and release of Vitamin C and Stigmasterol were analyzed by HPLC and Franz diffusion cells. P176 showed high silica affinity (~55 µg mg⁻¹), robust biophysical signals (Δf −35 to −38 Hz; rupture force ~154 pN; ζ shift −22 to−11.5 mV), and favorable adsorption energy (−48.5 kcal mol⁻¹, contact 4.5 nm², 8.5 H-bonds). The MMP gate displayed efficient kinetics (Vmax 117.9 RFU·min⁻¹, Km 5.0 µM) with >90% cleavage at 60 min, reduced to 26% by inhibitor. Conjugation yields reached 87% (Vitamin C) and 77% (Stigmasterol). Franz diffusion showed MMP-dependent release (24 h: Vitamin C 90–96%, Stigmasterol 80–85%) with minimal basal leakage. Released Vitamin C enhanced collagen I to ~250% in fibroblasts, while Stigmasterol attenuated LPS-induced macrophage morphology; keratinocytes retained normal marker expression. This study demonstrates that a single amphipathic, sequence-programmed peptide can couple strong silica anchoring with protease-responsive release and broad payload compatibility, establishing a versatile platform for spicule-based transdermal and regenerative delivery. Full article

(This article belongs to the Section B5: Drug Delivery System)

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10 pages, 964 KB

Open AccessEditorial

Editorial for the Special Issue on Heat and Mass Transfer in Microchannels

by Xin Xiao, Xuan Zhang and Long Zhang

Micromachines 2026, 17(1), 126; https://doi.org/10.3390/mi17010126 - 19 Jan 2026

Viewed by 209

Abstract

Research on heat and mass transfer in microchannels represents the cutting-edge frontier in modern high-density electronic cooling, advanced energy systems, and precision microfluidic manipulation [...] Full article

(This article belongs to the Special Issue Heat and Mass Transfer in Microchannels)

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20 pages, 1534 KB

Open AccessArticle

Low-Cost DLW Setup for Fabrication of Photonics-Integrated Circuits

by André Moreira, Alessandro Fantoni, Miguel Fernandes and Jorge Fidalgo

Micromachines 2026, 17(1), 125; https://doi.org/10.3390/mi17010125 - 19 Jan 2026

Viewed by 417

Abstract

The development of photonic-integrated circuits (PICs) for data communication, sensing, and quantum computing is hindered by the high complexity and cost of traditional fabrication methods, which rely on expensive equipment, limiting accessibility for research and prototyping. This study introduces a Direct Laser Writing [...] Read more.

The development of photonic-integrated circuits (PICs) for data communication, sensing, and quantum computing is hindered by the high complexity and cost of traditional fabrication methods, which rely on expensive equipment, limiting accessibility for research and prototyping. This study introduces a Direct Laser Writing (DLW) system designed as a low-cost alternative, utilizing an XY platform for precise substrate movement and an optical system comprising a collimator and lens to focus the laser beam. Operating on a single layer, the system employs SU-8 photoresist to fabricate polymer-based structures on substrates such as ITO-covered glass. Preparation involves thorough cleaning, spin coating with photoresist, and pre- and post-baking to ensure material stability. This approach reduces dependence on costly infrastructure, making it suitable for academic settings and enabling rapid prototyping. A user interface and custom slicer process standard .dxf files into executable commands, enhancing operational flexibility. Experimental results demonstrate a resolution of 10 µm, with successful patterning of structures, including diffraction grids, waveguides, and multimode interference devices. This system aims to transform PIC prototype fabrication into a cost-effective, accessible process. Full article

(This article belongs to the Special Issue Laser-Assisted Ultra-Precision Machining)

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19 pages, 6992 KB

Open AccessArticle

A Fault Identification Method for Micro-Motors Using an Optimized CNN-Based JMD-GRM Approach

by Yufang Bai, Zhengyang Gu, Junsong Yu and Junli Chen

Micromachines 2026, 17(1), 123; https://doi.org/10.3390/mi17010123 - 19 Jan 2026

Viewed by 299

Abstract

Micro-motors are widely used in industrial applications, which require effective fault diagnosis to maintain safe equipment operation. However, fault signals from micro-motors often exhibit weak signal strength and ambiguous features. To address these challenges, this study proposes a novel fault diagnosis method. Initially, [...] Read more.

Micro-motors are widely used in industrial applications, which require effective fault diagnosis to maintain safe equipment operation. However, fault signals from micro-motors often exhibit weak signal strength and ambiguous features. To address these challenges, this study proposes a novel fault diagnosis method. Initially, the Jump plus AM-FM Mode Decomposition (JMD) technique was utilized to decompose the measured signals into amplitude-modulated–frequency-modulated (AM-FM) oscillation components and discontinuous (jump) components. The proposed process extracts valuable fault features and integrates them into a new time-domain signal, while also suppressing modal aliasing. Subsequently, a novel Global Relationship Matrix (GRM) is employed to transform one-dimensional signals into two-dimensional images, thereby enhancing the representation of fault features. These images are then input into an Optimized Convolutional Neural Network (OCNN) with an AdamW optimizer, which effectively reduces overfitting during training. Experimental results demonstrate that the proposed method achieves an average diagnostic accuracy rate of 99.0476% for multiple fault types, outperforming four comparative methods. This approach offers a reliable solution for quality inspection of micro-motors in a manufacturing environment. Full article

(This article belongs to the Section E：Engineering and Technology)

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15 pages, 5132 KB

Open AccessArticle

A Spaceborne Integrated S/Ka Dual-Band Dual-Reflector Antenna

by Zenan Yang, Weiqiang Han, Liang Tang, Haihua Wang, Yilin Wang and Yongchang Jiao

Micromachines 2026, 17(1), 124; https://doi.org/10.3390/mi17010124 - 18 Jan 2026

Viewed by 312

Abstract

To address the diverse requirements of satellite communication applications involving medium-/low-rate reliable links and high-rate high-capacity services, an integrated S/Ka dual-band dual-reflector antenna is proposed as an effective solution. Owing to the stringent spatial constraints of satellite platforms, the longer operating wavelengths in [...] Read more.

To address the diverse requirements of satellite communication applications involving medium-/low-rate reliable links and high-rate high-capacity services, an integrated S/Ka dual-band dual-reflector antenna is proposed as an effective solution. Owing to the stringent spatial constraints of satellite platforms, the longer operating wavelengths in the S-band lead to oversized feed horns in the integrated antenna design, which induces severe secondary aperture blockage, thus degrading aperture efficiency and impeding practical mechanical layout implementation. To alleviate this critical drawback, the proposed antenna achieves multi-band aperture reuse by deploying an array with four miniaturized S-band radiating elements around a broadband Ka-band feed horn. A frequency-selective surface (FSS)-based sub-reflector is further designed to effectively enhance the effective aperture size for the S-band operation, while ensuring unobstructed electromagnetic propagation in the Ka-band, thus enabling simultaneous dual-band high-gain radiation. After comprehensive electromagnetic simulation and parametric optimization for the antenna feed and the FSS sub-reflector, experimental measurements verify that the S-band left-hand and right-hand circularly polarized (LHCP/RHCP) channels achieve more than 20.2 dBic gains with more than 6° half-power beamwidths (HPBWs), and the Ka-band channel yields gains exceeding 41.2 dBic, with HPBWs greater than 0.8°. Full article

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17 pages, 2450 KB

Open AccessArticle

Design, Fabrication and Characterization of Multi-Frequency MEMS Transducer for Photoacoustic Imaging

by Alberto Prud’homme and Frederic Nabki

Micromachines 2026, 17(1), 122; https://doi.org/10.3390/mi17010122 - 17 Jan 2026

Viewed by 347

Abstract

This work presents the design, fabrication, and experimental characterization of microelectromechanical system (MEMS) ultrasonic transducers engineered for multi-frequency operation in photoacoustic imaging (PAI). The proposed devices integrate multiple resonant geometries, including circular diaphragms, floated crosses, anchored cross membranes, and cantilever arrays, within compact [...] Read more.

This work presents the design, fabrication, and experimental characterization of microelectromechanical system (MEMS) ultrasonic transducers engineered for multi-frequency operation in photoacoustic imaging (PAI). The proposed devices integrate multiple resonant geometries, including circular diaphragms, floated crosses, anchored cross membranes, and cantilever arrays, within compact footprints to overcome the inherently narrow frequency response of conventional MEMS transducers. All devices were fabricated using the PiezoMUMPs commercial microfabrication process, with finite element simulations guiding modal optimization and laser Doppler vibrometry used for experimental validation in air. The circular diaphragm exhibited a narrowband response with a dominant resonance at 1.69 MHz and a quality factor (Q) of 268, confirming the bandwidth limitations of traditional geometries. In contrast, complex designs such as the floated cross and cantilever arrays achieved significantly broader spectral responses, with resonances spanning from 275 kHz to beyond 7.5 MHz. The cantilever array, with systematically varied arm lengths, achieved the highest modal density through asynchronous activation across the spectrum. Results demonstrate that structurally diverse MEMS devices can overcome the bandwidth constraints of traditional piezoelectric transducers. The integration of heterogeneous MEMS geometries offers a viable approach for broadband sensitivity in PAI, enabling improved spatial resolution and depth selectivity without compromising miniaturization or manufacturability. Full article

(This article belongs to the Special Issue MEMS and NEMS Sensors: Innovations, Applications, and Future Directions in Micro/Nano Technologies)

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18 pages, 4916 KB

Open AccessReview

Broadband Flexible Quantum Dots/Graphene Photodetectors

by Judy Z. Wu and Andrew Shultz

Micromachines 2026, 17(1), 121; https://doi.org/10.3390/mi17010121 - 16 Jan 2026

Viewed by 487

Abstract

Nanohybrids consisting of quantum dots and graphene (QD/graphene) provides a unique scheme to design quantum sensors. The quantum confinement in QDs enables spectral tunability, while that in graphene provides superior photocarrier mobility. The combination of them allows for broadband light absorption and high [...] Read more.

Nanohybrids consisting of quantum dots and graphene (QD/graphene) provides a unique scheme to design quantum sensors. The quantum confinement in QDs enables spectral tunability, while that in graphene provides superior photocarrier mobility. The combination of them allows for broadband light absorption and high photoconduction gain that in turn leads to high photoresponsivity in QD/Gr nanohybrid photodetectors. Since the first QD/graphene photodetector was reported in 2012, intensive research has been conducted on this topic. In this paper, a review of the recent progress made on QD/Gr nanohybrid photodetectors will be provided. Among many applications, there will be a particular focus on broadband and flexible photodetectors, which make use of the inherent advantages of the QD/Gr nanohybrids. The remaining challenges and future perspectives will be discussed in this emerging topic area. Full article

(This article belongs to the Special Issue Photodetectors and Their Applications)

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22 pages, 10582 KB

Open AccessArticle

A Novelty Temperature Compensation Model for Dual-Mass Vibration MEMS Gyroscope Based on Machine Learning and TTAO-VMD Algorithm

by Wenbo Tan, Yan Wang and Xinwang Wang

Micromachines 2026, 17(1), 120; https://doi.org/10.3390/mi17010120 - 16 Jan 2026

Viewed by 338

Abstract

The output of MEMS gyroscopes is highly vulnerable to ambient temperature variations, which induce temperature drift errors and degrade navigation precision. Consequently, temperature compensation for MEMS gyroscope outputs is of critical importance. To address this issue, this study proposes a novel temperature compensation [...] Read more.

The output of MEMS gyroscopes is highly vulnerable to ambient temperature variations, which induce temperature drift errors and degrade navigation precision. Consequently, temperature compensation for MEMS gyroscope outputs is of critical importance. To address this issue, this study proposes a novel temperature compensation model for the dual-mass vibration MEMS gyroscope (DMVMG), which integrates the TTAO-VMD, 1D-CNN-Bi-GRU-Attention, and SHAKF algorithms. The implementation process of the proposed model is as follows: firstly, the structural configuration and fundamental operating principle of the DMVMG are elaborated. Secondly, the temperature error compensation model is constructed based on the fusion of the TTAO-VMD, 1D-CNN-Bi-GRU-Attention, and SHAKF algorithms. Thirdly, the raw output signal of the DMVMG is preprocessed using the TTAO-VMD algorithm, which decomposes the signal into four distinct components, namely high-frequency noise, white noise, mixed noise, and temperature-induced noise. Subsequently, the high-frequency and white noise components are eliminated, while the mixed noise component is filtered via the SHAKF algorithm. On this basis, the 1D-CNN-Bi-GRU-Attention algorithm is adopted to establish the temperature error compensation model, with the temperature, temperature change rate, time, and temperature-induced noise as input variables. Finally, the optimized signal components are reconstructed to yield the temperature-compensated output of the DMVMG. The experimental results based on the Allan variance method demonstrate that the angle random walk (N) is reduced from 18.56

° / \sqrt{h}

to 0.17

° / \sqrt{h}

, and the bias instability (B) is decreased from 32.76 °/h to 0.82 °/h, verifying the effectiveness of the proposed method. Full article

(This article belongs to the Special Issue MEMS Inertial Device, 3rd Edition)

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32 pages, 8754 KB

Open AccessReview

Plasmonics Meets Metasurfaces: A Vision for Next Generation Planar Optical Systems

by Muhammad A. Butt

Micromachines 2026, 17(1), 119; https://doi.org/10.3390/mi17010119 - 16 Jan 2026

Viewed by 619

Abstract

Plasmonics and metasurfaces (MSs) have emerged as two of the most influential platforms for manipulating light at the nanoscale, each offering complementary strengths that challenge the limits of conventional optical design. Plasmonics enables extreme subwavelength field confinement, ultrafast light–matter interaction, and strong optical [...] Read more.

Plasmonics and metasurfaces (MSs) have emerged as two of the most influential platforms for manipulating light at the nanoscale, each offering complementary strengths that challenge the limits of conventional optical design. Plasmonics enables extreme subwavelength field confinement, ultrafast light–matter interaction, and strong optical nonlinearities, while MSs provide versatile and compact control over phase, amplitude, polarization, and dispersion through planar, nanostructured interfaces. Recent advances in materials, nanofabrication, and device engineering are increasingly enabling these technologies to be combined within unified planar and hybrid optical platforms. This review surveys the physical principles, material strategies, and device architectures that underpin plasmonic, MS, and hybrid plasmonic–dielectric systems, with an emphasis on interface-mediated optical functionality rather than long-range guided-wave propagation. Key developments in modulators, detectors, nanolasers, metalenses, beam steering devices, and programmable optical surfaces are discussed, highlighting how hybrid designs can leverage strong field localization alongside low-loss wavefront control. System-level challenges including optical loss, thermal management, dispersion engineering, and large-area fabrication are critically examined. Looking forward, plasmonic and MS technologies are poised to define a new generation of flat, multifunctional, and programmable optical systems. Applications spanning imaging, sensing, communications, augmented and virtual reality, and optical information processing illustrate the transformative potential of these platforms. By consolidating recent progress and outlining future directions, this review provides a coherent perspective on how plasmonics and MSs are reshaping the design space of next-generation planar optical hardware. Full article

(This article belongs to the Special Issue Photonic and Optoelectronic Devices and Systems, 4th Edition)

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22 pages, 3453 KB

Open AccessReview

Diamond Sensor Technologies: From Multi Stimulus to Quantum

by Pak San Yip, Tiqing Zhao, Kefan Guo, Wenjun Liang, Ruihan Xu, Yi Zhang and Yang Lu

Micromachines 2026, 17(1), 118; https://doi.org/10.3390/mi17010118 - 16 Jan 2026

Viewed by 647

Abstract

This review explores the variety of diamond-based sensing applications, emphasizing their material properties, such as high Young’s modulus, thermal conductivity, wide bandgap, chemical stability, and radiation hardness. These diamond properties give excellent performance in mechanical, pressure, thermal, magnetic, optoelectronic, radiation, biosensing, quantum, and [...] Read more.

This review explores the variety of diamond-based sensing applications, emphasizing their material properties, such as high Young’s modulus, thermal conductivity, wide bandgap, chemical stability, and radiation hardness. These diamond properties give excellent performance in mechanical, pressure, thermal, magnetic, optoelectronic, radiation, biosensing, quantum, and other applications. In vibration sensing, nano/poly/single-crystal diamond resonators operate from MHz to GHz frequencies, with high quality factor via CVD growth, diamond-on-insulator techniques, and ICP etching. Pressure sensing uses boron-doped piezoresistive, as well as capacitive and Fabry–Pérot readouts. Thermal sensing merges NV nanothermometry, single-crystal resonant thermometers, and resistive/diode sensors. Magnetic detection offers FeGa/Ti/diamond heterostructures, complementing NV. Optoelectronic applications utilize DUV photodiodes and color centers. Radiation detectors benefit from diamond’s neutron conversion capability. Biosensing leverages boron-doped diamond and hydrogen-terminated SGFETs, as well as gas targets such as NO₂/NH₃/H₂ via surface transfer doping and Pd Schottky/MIS. Imaging uses AFM/NV probes and boron-doped diamond tips. Persistent challenges, such as grain boundary losses in nanocrystalline diamond, limited diamond-on-insulator bonding yield, high temperature interface degradation, humidity-dependent gas transduction, stabilization of hydrogen termination, near-surface nitrogen-vacancy noise, and the cost of high-quality single-crystal diamond, are being addressed through interface and surface chemistry control, catalytic/dielectric stack engineering, photonic integration, and scalable chemical vapor deposition routes. These advances are enabling integrated, high-reliability diamond sensors for extreme and quantum-enhanced applications. Full article

(This article belongs to the Special Issue MEMS and NEMS Sensors: Innovations, Applications, and Future Directions in Micro/Nano Technologies)

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34 pages, 5134 KB

Open AccessReview

Inverse Lithography Technology (ILT) Under Chip Manufacture Context

by Xiaodong Meng, Cai Chen and Jie Ni

Micromachines 2026, 17(1), 117; https://doi.org/10.3390/mi17010117 - 16 Jan 2026

Viewed by 471

Abstract

As semiconductor process nodes shrink to 3 nm and beyond, traditional optical proximity correction (OPC) and resolution enhancement technologies (RETs) can no longer meet the high patterning precision needs of advanced chip manufacturing due to the sub-wavelength lithography limits. Inverse lithography technology (ILT), [...] Read more.

As semiconductor process nodes shrink to 3 nm and beyond, traditional optical proximity correction (OPC) and resolution enhancement technologies (RETs) can no longer meet the high patterning precision needs of advanced chip manufacturing due to the sub-wavelength lithography limits. Inverse lithography technology (ILT), a key part of computational lithography, has become a critical solution for these issues. From an EDA industry perspective, this review provides an original and systematic summary of ILT’s development and applications, which helps integrate the scattered research into a clear framework for both academic and industrial use. Compared with traditional OPC, the latest ILT has three main advantages: (1) better patterning accuracy, as a result of the precise optical models that fix complex optical issues (like diffraction and interference) in advanced lithography systems; (2) a wider process window, as it optimizes mask designs by working backwards from the target wafer patterns, making lithography more stable against process changes; and (3) stronger adaptability to new lithography scenarios, such as High-NA EUV and extended DUV nodes. This review first explains ILT’s working principles (the basic concepts, mathematical formulae, and main methods like level-set and pixelated approaches) and its development history, highlighting key events that boosted its progress. It then analyzes ILT’s current application status in the industry (such as hotspot fixing, full-chip trials, and EUV-era use) and its main bottlenecks: a high computational complexity leading to long runtime, difficulties in mask manufacturing, challenges in model calibration, and a conservative market that slows large-scale adoption. Finally, it discusses promising future directions, including hybrid ILT-OPC-SMO strategies, improving model accuracy, AI/ML-driven design, GPU acceleration, multi-beam mask writer improvements, and open-source data to solve data shortage problems. By combining the latest research and industry practices, this review fills the gap of comprehensive ILT summaries that cover the principles, progress, applications, and prospects. It helps readers fully understand ILT’s technical landscape and offers practical insights for solving the key challenges, thus promoting ILT’s industrial use in advanced chip manufacturing. Full article

(This article belongs to the Special Issue Recent Advances in Lithography)

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13 pages, 1385 KB

Open AccessArticle

Mechanical Properties of Additively Manufactured Composite Resin vs. Subtractively Manufactured Hybrid Ceramic Implant-Supported Permanent Crowns Before and After Thermal Aging

by Nilufer Ipek Sahin and Emre Tokar

Micromachines 2026, 17(1), 116; https://doi.org/10.3390/mi17010116 - 16 Jan 2026

Viewed by 273

Abstract

This study aims to compare the surface roughness and fracture resistance of implant-supported permanent crowns additively manufactured using composite resins (Crowntec, VarseoSmile) versus subtractively manufactured polymer-infiltrated hybrid ceramic (VITA Enamic) at various wall thicknesses using an experimental setup as close to clinical as [...] Read more.

This study aims to compare the surface roughness and fracture resistance of implant-supported permanent crowns additively manufactured using composite resins (Crowntec, VarseoSmile) versus subtractively manufactured polymer-infiltrated hybrid ceramic (VITA Enamic) at various wall thicknesses using an experimental setup as close to clinical as possible. 180 crowns were fabricated in three thicknesses (1.0, 1.5, and 2.0 mm) and cemented onto titanium abutments. Experimental groups underwent thermal aging (10,000 cycles) to simulate one year of clinical service. Surface roughness was measured via profilometry, and fracture resistance was assessed using a universal testing machine. Composite resin crowns exhibited lower surface roughness and lower fracture resistance than subtractively manufactured crowns. No significant difference in fracture resistance was found between materials at 1.0 mm (p > 0.05). However, at 1.5 and 2.0 mm, hybrid ceramic network crowns showed significantly higher resistance (p < 0.01). It was concluded that, within the limitations of this 1-year simulated study, both material-method combinations met the biological threshold for surface roughness. Regarding fracture resistance, composite resins and hybrid ceramics satisfied clinical requirements for molar bite forces only at thicknesses of 1.5 mm and above. 1.0 mm thickness may pose a risk under high occlusal loads. Full article

(This article belongs to the Section D3: 3D Printing and Additive Manufacturing)

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16 pages, 13859 KB

Open AccessFeature PaperArticle

Micromanufacturing Process of Complex 3D FeCo Core Microwindings for Magnetic Flux Modulation in Micromotors

by Efren Diez-Jimenez, Diego Lopez-Pascual, Gabriel Villalba-Alumbreros, Ignacio Valiente-Blanco, Miguel Fernandez-Munoz, Jesús del Olmo-Anguix, Oscar Manzano-Narro, Alexander Kanitz, Jan Hoppius and Jan Philipp

Micromachines 2026, 17(1), 115; https://doi.org/10.3390/mi17010115 - 15 Jan 2026

Cited by 1 | Viewed by 354

Abstract

This work presents the design, fabrication, and characterization of a three-dimensional FeCo-based flux-modulator microwinding intended for integration into high-torque axial-flux Vernier micromotors. The proposed micromotor architecture modulates the stator magnetic flux using 12 magnetically isolated FeCo teeth interacting with an 11-pole permanent-magnet rotor. [...] Read more.

This work presents the design, fabrication, and characterization of a three-dimensional FeCo-based flux-modulator microwinding intended for integration into high-torque axial-flux Vernier micromotors. The proposed micromotor architecture modulates the stator magnetic flux using 12 magnetically isolated FeCo teeth interacting with an 11-pole permanent-magnet rotor. The design requires the manufacturing of complex three-dimensional micrometric parts, including three teeth and a cylindrical core. Such a complex design cannot be manufactured using conventional micromanufacturing lithography or 2D planar methods. The flux-modulator envelope dimensions are 250 μm outer diameter and 355 μm height. It is manufactured using a femtosecond laser-machining process that preserves factory-finished surfaces and minimizes heat-affected zones. In addition, this micrometric part has been wound using 20 μm diameter enamelled copper wire. A dedicated magnetic clamping fixture is developed to enable multilayer microwinding of the integrated core, producing a 17-turn inductor with a 60.6% fill factor—the highest reported for a manually wound ferromagnetic-core microcoil of this scale. Geometric and magnetic characterization validates the simulation model and demonstrates the field distribution inside the isolated core. The results establish a viable micromanufacturing workflow for complex 3D FeCo microwindings, supporting the development of next-generation high-performance MEMS micromotors. Full article

(This article belongs to the Section E：Engineering and Technology)

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