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Journal: Micromachines, 2018
Volume: 9
Number: 413

Article: Wide Acoustic Bandgap Solid Disk-Shaped Phononic Crystal Anchoring Boundaries for Enhancing Quality Factor in AlN-on-Si MEMS Resonators
Authors: by Muhammad Wajih Ullah Siddiqi and Joshua E.-Y. Lee
Link: https://www.mdpi.com/2072-666X/9/8/413

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