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Micromachines 2018, 9(2), 72;

Controlling of Electrospray Deposition for Micropatterns

1,2,3,* , 1,2,3
Department of Instrumental and Electrical Engineering, Xiamen University, Xiamen 361005, China
Xiamen Key Laboratory of Optoelectronic Transducer Technology, Xiamen 361005, China
Fujian Key Laboratory of Universities and Colleges for Transducer Technology, Xiamen 361005, China
School of Mechanical and Automotive Engineering, Xiamen University of Technology, Xiamen 361024, China
School of Mathematical Sciences, Xiamen University, Xiamen 361005, China
Author to whom correspondence should be addressed.
Received: 31 December 2017 / Revised: 26 January 2018 / Accepted: 2 February 2018 / Published: 6 February 2018
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Based on the electrohydrodynamic (EHD) theory, a novel method of near-field electrospray is proposed to fabricate micropatterns with micro/nano-scale particles. Compared with conventional electrospray technology, the deposition area can be decreased to print a regular pattern according to the moving trajectory of the substrate by shortening the distance between the nozzle and the collector to several millimeters in near-field electrospray. The controlling strategies in the near-field electrospray deposition process were investigated. The line width of printed pattern increased with the increase of applied voltage, deposition time, and flow rate of solution. However, it decreased with the increase of motion velocity of the substrate. By applying a suitable matching of electrospray parameters, the regular patterns with a line width under 500 μm were printed controllably on the substrate. Thereby, atomized particles from near-field electrospray were successfully deposited in specific patterns. Characters of ‘2’, ‘7’, and ‘9’ with uniform width and steady shape were patterned. This work provides an excellent way to promote the precision integrated manufacturing of electronic system. View Full-Text
Keywords: near-field electrospray; micropatterns; atomized particles; deposition controlling near-field electrospray; micropatterns; atomized particles; deposition controlling

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Jiang, J.; Zheng, G.; Zhu, P.; Liu, J.; Liu, Y.; Wang, X.; Li, W.; Guo, S. Controlling of Electrospray Deposition for Micropatterns. Micromachines 2018, 9, 72.

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