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Journal: Micromachines, 2017
Volume: 8
Number: 323
Article:
Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method
Authors:
by
Mao Mukaida and Jiwang Yan
Link:
https://www.mdpi.com/2072-666X/8/11/323
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