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Journal: MicromachinesVolume: 8Number: 312
Article: Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode
- Authors:
- Nguyen Van Toan 1,*,
- Tsuyoshi Shimazaki 1 and
- Takahito Ono 1
- et al.
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