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Journal: Micromachines, 2017
Volume: 8
Number: 312
Article:
Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode
Authors:
by
Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Yunheub Song and Takahito Ono
Link:
https://www.mdpi.com/2072-666X/8/10/312
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