- Article
Glass Imprint Templates by Spark Assisted Chemical Engraving for Microfabrication by Hot Embossing
- Lucas Abia Hof,
- Xin Guo,
- Minseok Seo,
- Rolf Wüthrich and
- Jesse Greener
As the field of microelectromechanical systems (MEMS) matures, new demands are being placed on the microfabrication of complex architectures in robust materials, such as hard plastics. Iterative design optimization in a timely manner—rapid prototypin...

