- Article
An Investigation of Processes for Glass Micromachining
- Nguyen Van Toan,
- Masaya Toda and
- Takahito Ono
This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the expe...

