- Article
Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses
- Simas Butkus,
- Aleksandr Alesenkov,
- Domas Paipulas,
- Eugenijus Gaižauskas,
- Andrius Melninkaitis,
- Dalia Kaškelytė,
- Martynas Barkauskas and
- Valdas Sirutkaitis
Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water lay...

