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Micromachines 2015, 6(12), 2010-2022;

Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses

Laser Research Centre, Vilnius University, Saulėtekio Av. 10, Vilnius LT-10223, Lithuania
Author to whom correspondence should be addressed.
Academic Editor: Stefan Dimov
Received: 29 October 2015 / Revised: 8 December 2015 / Accepted: 14 December 2015 / Published: 17 December 2015
(This article belongs to the Collection Laser Micromachining and Microfabrication)
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Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water layer, non-linear self-action mechanisms transform the beam, which enables higher quality and throughput micromachining results compared to focusing in air. Evidence of beam transformation into multiple light filaments is presented along with theoretical modeling results. In addition, multiparametric optimization of the fabrication process was performed using statistical methods and certain acquired dependencies are further explained and tested using laser shadowgraphy. We demonstrate that this micromachining process exhibits complicated dynamics within the water layer, which are influenced by the chosen parameters. View Full-Text
Keywords: femtosecond ablation; micromachining; light filaments; optimization; shadowgraphy femtosecond ablation; micromachining; light filaments; optimization; shadowgraphy

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Butkus, S.; Alesenkov, A.; Paipulas, D.; Gaižauskas, E.; Melninkaitis, A.; Kaškelytė, D.; Barkauskas, M.; Sirutkaitis, V. Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses. Micromachines 2015, 6, 2010-2022.

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