Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses
Abstract
:1. Introduction
2. Experimental Section
2.1. Ablation Patterns Acquired while Focusing Intense Laser Pulses in Water
2.2. Optimization of Micromachining Process Using DOE Techniques
Parameters | Numeric Values | ||
---|---|---|---|
(S) Scanning speed (mm/s) | 20 | 760 | 1500 |
(T) Water layer thickness (mm) | 0.6 | 1 | 1.5 |
(R) Repetition rate (kHz) | 33.3 | 116.6 | 200 |
(F) Focal position (mm) | –1 | 0 | 1 |
2.3. Shadowgraphic Investigation
3. Results and Discussion
3.1. Ablation Patterns Acquired while Focusing Intense Laser Pulses in Water
3.2. Optimization of the Micromachining Process
Parameters | Numeric Value Range | ||
---|---|---|---|
(S) Scanning speed (mm/s) | 20 | - | 760 |
(T) Water layer thickness (mm) | 0.3 | - | 0.9 |
(R) Repetition rate (kHz) | 33.3 | - | 108.3 |
(F) Focal position (mm) | -1 | - | 0.1 |
3.3. Shadowgraphic Investigation
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Butkus, S.; Alesenkov, A.; Paipulas, D.; Gaižauskas, E.; Melninkaitis, A.; Kaškelytė, D.; Barkauskas, M.; Sirutkaitis, V. Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses. Micromachines 2015, 6, 2010-2022. https://doi.org/10.3390/mi6121471
Butkus S, Alesenkov A, Paipulas D, Gaižauskas E, Melninkaitis A, Kaškelytė D, Barkauskas M, Sirutkaitis V. Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses. Micromachines. 2015; 6(12):2010-2022. https://doi.org/10.3390/mi6121471
Chicago/Turabian StyleButkus, Simas, Aleksandr Alesenkov, Domas Paipulas, Eugenijus Gaižauskas, Andrius Melninkaitis, Dalia Kaškelytė, Martynas Barkauskas, and Valdas Sirutkaitis. 2015. "Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses" Micromachines 6, no. 12: 2010-2022. https://doi.org/10.3390/mi6121471