Wang, D.; Lei, C.; Ji, P.; Li, Z.; Yuan, R.; Yu, J.; Liang, T.; Yao, Z.; Li, J.
Optimization Method for the Synergistic Control of DRIE Process Parameters on Sidewall Steepness and Aspect Ratio. Micromachines 2026, 17, 13.
https://doi.org/10.3390/mi17010013
AMA Style
Wang D, Lei C, Ji P, Li Z, Yuan R, Yu J, Liang T, Yao Z, Li J.
Optimization Method for the Synergistic Control of DRIE Process Parameters on Sidewall Steepness and Aspect Ratio. Micromachines. 2026; 17(1):13.
https://doi.org/10.3390/mi17010013
Chicago/Turabian Style
Wang, Dandan, Cheng Lei, Pengfei Ji, Zhiqiang Li, Renzhi Yuan, Jiangang Yu, Ting Liang, Zong Yao, and Jialong Li.
2026. "Optimization Method for the Synergistic Control of DRIE Process Parameters on Sidewall Steepness and Aspect Ratio" Micromachines 17, no. 1: 13.
https://doi.org/10.3390/mi17010013
APA Style
Wang, D., Lei, C., Ji, P., Li, Z., Yuan, R., Yu, J., Liang, T., Yao, Z., & Li, J.
(2026). Optimization Method for the Synergistic Control of DRIE Process Parameters on Sidewall Steepness and Aspect Ratio. Micromachines, 17(1), 13.
https://doi.org/10.3390/mi17010013
