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Journal: Micromachines, 2025
Volume: 16
Number: 1066
1066
Article: Effect of Hafnium-Based Thin Film Thickness on Microstructure and Electrical of Yttrium-Doped Hafnium Oxide Ferroelectric Devices Prepared by Magnetron Sputtering
Authors: by Bei Ma, Ke Ma, Xinhui Qin, Yingxue Xi, Jin Zhang, Xinyu Yang, Pengfei Yang and Weiguo Liu
Link: https://www.mdpi.com/2072-666X/16/9/1066

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